240-451 VLSI, 2000 1 Lecture 5 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Design Rules.

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VLSI, Lecture 5 Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Design Rules

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Design Rules Interface between designer and process engineer Guidelines for constructing process masks Unit dimension: Minimum line width –scalable design rules: lambda parameter –absolute dimensions (micron rules)

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 1. Diffusion not lower than 2  2. Poly not lower than 2  22 22

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 3. Diffusion and diffusion not lower than 3  33

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut 4. Poly and poly not lower than 2  Mead and Conway 22

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 5. Poly and diffusion not lower than 1  11

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 6. Poly cross diffusion 22

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway  1 1 

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 8. Contact cut on diffusion 22 22

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 9. Contact cut on poly 22 22

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut 22 22 Mead and Conway 10. Contact cut on metal

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut 11.,12. In Metal Mead and Conway 33 33

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 13.,14. Contact Cut 33 22

VLSI, Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut Mead and Conway 15. Buttering contact 66 44 