Preparation chamber 1.Chamber status 2.Preparation methods 3.Results: photocurrent, stoichoimetric control 4.Next step
1. Chamber status Verdampfer Blendenmodul Laser Control system test Thickness monitor Cathode heating High voltage Shutter Cathode plug
2.Methods Cu-sampleSi-waferCu-cathode standard712 sandwich001 co-evaporation010
3. Results Vacuum in the experiment # Photocurrent # Vacuum is not good enough
3. Results Stoichiometric control: Cs/Te ~ 2 NrSub. Te thickness Cs thickness Cs/Te PIXE RBS # Cu10 nm20 nm # Cu10 nm68 nm\1.9 # Si10 nm70 nm1.6\ # Co-evap. Si10 nm46 nm0.8 It is hard to control.
Stoichiometric rate measure (example: # CsTe on Cu) 1. PIXE: Cs/Te=0.55 (calculated by GUPIX, Dr. Grambole) 2. RBS: Cs/Te=0.44 (calculated by XRUMP, Hr. Zhou)
photocurrent measurement Photocurrent pulse
4.Next step 1.Chamber cleaning ( mbar) 2.Mo cathode polishing (0.1µm) 3.Clean-room rebuilding Homepage: Logbuch:
NrsubstratumMethodTeCsCs/TePhotocurr.Vacuumcomment nm mbar # Custandard First test # Custandard No HV #03-17Custandard *10 -7 No HV # Custandard µA4.3*10 -7 First photocurrent # Custandard µA3.8*10 -7 QE scan inhomogeneous Improve sources, polish Cu samples, increase high voltage -6 unpolished -6 # Sistandard \2.5*10 -6 # SiCo-evap \ First test on co-evaporation -6
Thickness Quartz thickness monitor STM-1
Co-evaporation #
RBS for thickness and atom rate