Prabhakara Rao November 3, 2015 National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India Cleanroom Admin Committee Meeting Prabhakara Rao November 3, 2015

Reports September month charges CeNSE users charged 72% of total value 122 Users - Total charges at a high of 29.7 L 29 NON-MITO users (Paid Users) - Total charges of 4 L 93 MITO084 users - Total charges of 25.7 L 64 users from CeNSE - Total charges of 21.45 L CeNSE users charged 72% of total value

Reports Data April-15 May-15 June-15 July-15 Aug-15 Sep-15 Total Users 97 110 120 103 113 122 MITO084 users 79 91 95 80 87 93 Non-MITO Users 18 19 25 23 26 29 Total users from CeNSE 55 63 60 52 61 64 Total charges for MITO084 18.75 L 15.5 L 22.25 L 22.47 L 22.18 L 25.7 L Total charges for Paid users 2.3 L 1.86 L 2.5 L 2.95 L 3.54 L 4 L

April 2015 - Nov 2015 - INUP project Status Summary completed 23 ongoing 4 pending 27

INUP Project Status from April-Nov,2015 Sl.No: Participant Name University Project Title Status 1 Sudhakumari ISM Dhanbad Fabrication of gold nanoslit binary grating for developing ultrasensitive label free plasmonic biosensor completed 2 Lintu rajan NIT jaipur Design and characterization of nanostructured ZnO thin films based heterojunction/schottky  diode for gas sensing application 3 Mahaveer Jain University Microchannel //master preparation 4 Papanasam IIIT kancheepuram Fabrication and characterization of SiC MIS capacitors with different dielectrics 5 Anjali Choudary BHU Fabrication of Microfluidic based Neuromuscular junctions on a chip 6 Manjunath BMS college Microwave assisted synthesis of metal oxide nanomaterials and study of opto electronic properties 7 Ummer IIT Kanpur Silicon photonic crystal 8 Robin khosla IIT Mandi Alternate High K dielectric for semiconductor memories 9 Arun Mehta KSR Group of Institutions ,Namakal Natural Rutile Sand as a sustainable source of nano Titania for Dye Sensitized Solar Cell Applications characterisation to be scheduled 10 Vidya Rajan Calicut University Studies on functionalized graphene 11 Shanker Narayanan Anna University AlGaN Based biosensors 12 Sumanth Bangalore University Colloidal quantum dot solar cell 13 Jaya calicut University Fabrication and characterization of transparent p-n heterojunction diodes 14 Priyanka kakoty Tezpur Fabrication of MOS gate sensor for tea and other food aroma sensing 15 Anil kumar Pal Pondicherry university ZnO based hybrid nanostructures ongoing 16 Sunitha Victoria college PKD P type oxide semiconductors First stage completed 17 Sivasundari Annamalai university Pulse width modulation technique based MEMS pressure sensor 18 joshitha SSN College TN Bistable switch 19 Dinesh Kumar Preparation and Characterization of the (Pt-Ti)/TiO2/Silicon MOS capacitor for sensor applications. 20 Hema Rao IIT bhubaneshwar Fabrication of MOS using SiC substrate 21 Nimith K NIT surathkal Fabrication and Characterization of Polymer Light Emitting Diodes (PLEDs) 22 Tarun Sharma Thapar University punjab Fabrication of Nano-channel Hybrid Plasmonic Waveguide for Nano-scale Optical Confinement and Long range Propagation 23 Manu krishnan IITM Fabrication of optical MEMS device 24 parmeshwari Mangalore University Characterisation 25 Anita Murugakar ECE , IISC Microwave cavity resonators 26 Satyajit Sahoo VIT chennai TiO2 based memristor (ReRAM) crossbar solid state memory Ongoing 27 Jyotirmoy Dutta Shiv Nadar University, UP Design and Development of Thin Film Bulk Acoustic Wave Resonator Filter for RF applications

Internal Users Total Amount – 45,31,422 Sl.no Professor Project Code 1. Prof. S. Raghavan CDAC0018/ Consumables 21,63,753.00 2. MITO-098 5,70,000.00 3. Prof.Rudra Pratap NPMA-034 9,00,000.00 4. 84,304.00 5. Prof.Navakanta Bhat BIARC 1,50,000.00 6. NPMA-035 6,12,365.00 7. 51,000.00 Total Amount – 45,31,422

Comparison with other cleanrooms Description SITAR SCL CeNSE Remarks Fire alarm system Addressable(Notifier) Addressable(Morley) Conventional Need to check all detectors in a Zone. Panic button Installed in each bay Not available In Emergency user need to call BMS. FM200 Installed Not installed Not harmful to the equipment. Water sprinkler Equipment may damage. Need to install in A/C ducts & utility cleanroom tunnel also. VESDA Aspirators locations need to be change. Liquid leak detector Leakage (other than PCW,DI) only can find when go for an inspection. Hydrant system Installed, but functional System not working, pump house under Biological Dept. Gas cabin-Magnehelic gauge Exhaust- rate of air flow can’t see.

Fire and safety need to improve Emergency Response team (ERT) to be formed. Addressable panel to be installed in cleanroom with minimum 6 detectors in each bay and return air path(5-8 Lakhs). Aspirator system to be installed at return air path before mixing with the fresh air 11-15 Lakhs).(present Vesda system 4 nos can utilize) Corridor area, Utility building, – FAS to be installed. (Present conventional panel for cleanroom can utilize.) Panic button to be installed at each bay.(50,000 with in-house team) Fire alarm to be integrated with Access control system.(In-house team) CCTV to be installed at plenum area. (1Lakh) CeNSE building Fire Alarm system to be reprogrammed with new locations.(75,000) Hydrant system to be maintained with pressurized water. (Pump house under Biological dept., Nozzles and hoses to be placed in each fire Hydrant box)

Faculty ERT - Members Cleanroom- BMS Utility- Thiyagu, Shift Electrician NNfC- Raghu, Smitha, Adithi, Suresh MNCF- Prakash, Sterin GF- Narahari, Arun FF- Marsha, Gajendra SF- Reshma, Jithin TF- Manjunath, Pandian

Cleanroom Vesda & FAS Sensor location Plenum FFU From AHUs Cleanroom Air flow pattern Aspirators (VESDA) FAS Sensor Below raise floor Dry Cooling coil

Annual maintenance schedule Sl Effected areas   Dec-15 Team Leader Remarks 5 6 7 8 9 10 11 12 13 CeNSE Vendor 1 Wet Scrubber Gajendra Nanoclean Cleaning of -poll rings, nozzles, Tank ,leak arresting, Pump installation. 2 General & Dry exhaust system General servicing. 3 AHU-1, 2 & 3 Over all servcing 4 Gas system UHP Chilled water pumps General servicing, Water seal replacement. Chiller 1,2&3 PJP PCW & DC system Draining & refilling of water & general servicing Process vacuum, HV Clean room UPS & EB panel Tyaganand Cleaning of contactors, tightening of contacts,cables etc. ETP General servicing, RO Fire protection system DI 14 LT & UPS panels Utility Thiyaganand 15 Electrical panels- CeNSE 16 DGs NK Diesel General servicing,Cleaning of contactors, tightening of contacts,cables etc. 17 Final inspection and Cleaning Major Spare parts requirement: VFD for PCW- 3 Lakhs, General exhaust dampers 2nos – 1.5 Lakhs, DCP, AHU Valve actuators- 2 Lakhs.

Staff Concerns Wage Revision Medical Insurance

Lithography Bay October, 2015 Equipments: •Laser writer, MicroTech •Laser writer, Heidelberg •EVG Mask aligner •MJB4 mask aligner •EVG Bonder •E‐Line system •Pioneer E‐beam system Gopal

Litho Equipments Utilization Chart – Oct 2015, E- beam systems

Maintenance Issues All Litho tools are up, no down time during Sept. MJB4 needs AMC

Raith PIONNER Training Database Sl No Requested date Batch Staring date End Date Name Department Status 1 5/6/2015 6/29/2015 7/22/2015 Tathagata Paul Physics Done 2 5/12/2015 Banani Biswas CeNSE 3 5/14/2015 sukanya pal physics, IISc 4 Awanish pandey 5 7/27/2015 8/12/2015 Vadivukkarasi J 6 5/20/2015 Chandrika T N ECE Did Not come 7 6/3/2015 Basant Chitara MRC 8 6/24/2015 Bhupendra Kumar Sharma 9 8/17/2015 09-09-2015 Irfan Ansari 10 Pranav Santosh Mundada UG programme 11 7/17/2015 Abraham Mathew Koshy PHYSICS 12 8/14/2015 10/5/2015 Going on Samprita Nandi UG (Physics) done 13 8-25-2015 Aditya Hambarde

Raith e-LiNE Training Database ( July-Aug. 2015) Sl No Requested date Batch Staring date End Date Name Department Status 1 4/7/2015 6/9/2015 7/6/2015 Siddharth Nambiar CeNSE Done 2 4/15/2015 Vadivukkarasi J 3 4/17/2015 banani biswas Did not Come 4 4/26/2015 Awanish pandey 5 4/28/2015 7/9/2015 8/3/2015 Venkateshwara Rao Kolli ECE,IISC 6 4/29/2015 Avijit Chatterjee 7 5/3/2015 Shubhadeep B 8 Charanjeet Malhi IISc 9 Rameshnaidu jenjeti IPC 10 5/18/2015 8/6/2015 8/27/2015 Sandip Mondal Physics Skipped 11 5/20/2015 manas ranjan sahu physics 12 5/24/2015 Arup Paul 13 6/12/2015 Swapnil 14 6/15/2015 Sumit kumar 15 6/16/2015 Jafar Hasan Materials Engineering 16 9/1/2015 9/22/2015 Dharitri Narjaree cense 17 6/20/2015 Divya Somvanshi ECE 18 7/1/2015 santosh chiniwar 19 Soumyadeep Dutta Indian Institute of Science 20 8/4/2015 Chandrika T N 21 8/5/2015 24-9-2015 Going on Vijay 22 8/19/2015 24-9-2016 vaibhav rana 23 8/24/2015 24-9-2017 Chandan Kumar 24 9/15/2015 24-9-2018 Abinash Kumar   25 9/21/2015 24-9-2019 Arjun Shetty

EVG Mask aligner training statistics (July-Aug.2015) Full Name Department Contact email address Level of Training Pramod Ravindra CeNSE pramod.rvndr@gmail.com Not attended B K Sharma Physics bhupi11@gmail.com Mrityunjay mrityunjay@cense.iisc.ernet.in, Level 1 Nayana Ramesh nayana.r@cense.iisc.ernet.in, Thulasi IAP ramantfb@iap.iisc.ernet.in, Prabhat prabhat@cense.iisc.ernet.in, Rizwana parween rizwanap@gmail.com, Harshitha skharshitha@cense.iisc.ernet.in, Dhananjay dhananjay@cense.iisc.ernet.in Yet to be trained Ankit soni CEDT sankit@cedt.iisc.ernet.in Dharithri dhar.9.narj@gmail.com Nithin nithinb@cense.iisc.ernet.in Level 2 Avijit avijitc@cense.iisc.ernet.in Puneet sharma sharma_puneet@live.in Adithi raman Mechanical araman@mecheng.iisc.ernet.in Sreenath bsreenat@mecheng.iisc.ernet.in Vikram vikramg@mecheng.iisc.ernet.in Manish sachdeva sachdeva@mecheng.iisc.ernet.in Divya ECE dsomvanshi@ece.iisc.ernet.in Bhavin bhavin@mecheng.iisc.ernet.in Meera meera.v.garud@gmail.com Shreesha prabhu prabhu.shreesha@gmail.com Semonti semonti@physics.iisc.ernet.in, Jatin Chemical jatin@nanobiophotonics.org Rituparna ritu@cense.iisc.ernet.in Mustaque ali MRC mustaqueali@mrc.iisc.ernet.in Praneet praneet@cense.iisc.ernet.in Banani biswas.banani18@gmail.com Hailu Dessalegn Ayalew hailudessalegn@yahoo.com Sujoy Chemistry sujoy@ipc.iisc.ernet.in kondaiah paruchurikondaiah@gmail.com Atul atul@physics.iisc.ernet.in Basant b.aawargi@gmail.com Bhuvana bhuvana@cense.iisc.ernet.in Abhishek abhishekka196@gmail.com Karthik karthik@cense.iisc.ernet.in Vinit vkm@mecheng.iisc.ernet.in Shashank shashank@cense.iisc.ernet.in Level 1 Single Layer Exposure Level 2 Top Side Alignment Level 3 Bottom Side Alignment Total: 38 users

Training Completion Date MJB4 Mask aligner training statistics (July-Aug.2015) Si No User Name Department Training Request Date Training Completion Date Level of training 1 Preethi Deshpande CeNSE 8/9/2015 9/1/2015 Level 1 2 Abishek 8/8/2015 9/3/2015 3 Shreesha Phrabu 8/11/2015 8/24/2015 Level 2 4 Sonthosh kumar Not attended 5 mrityunjay Shukla 8/5/2015 6 Nayana Ramesh 9/5/2015 Going on 7 Vinit Kumar MechEngg 9/7/2015 Level 1 Single Layer Exposure Level 2 Top Side Alignment

Furnaces and wet benches Savitha P

Dry Etch and Thin films & Process Integration Nov 3 ,2015 Sunanda Babu

Equipment Utilization DRIE:SMC chiller was down due to refrigerant leak, leak fixed. RIE-Cl and RIE-F: AMC for both tools completed. E-beam: Planetary rotation ball-bearing faulty, replaced and resolved.

Equipment Utilization

INUP External Project Status(Oct’15) PI Owner Start Date ECD Mask Layers Status MSRIT RF MEMS switch(2014-2015 (Laxmi) Owner: Siva Bkup:Sabiha Oct’14 May’15 4 Closed MTRDC TWT SWS(Anurag) Jun’15 May’16 2 3rd mask written wit both structures, superimposed. With e-beam Al2O3 as hard mask, DRIE of straight channel(70um deep) and superimposed serpentine channel(375um deep) processing completed. Results look promising. Go ahead with gold coating, and then wafer-wafer bonding. RCI Accelerometer(Mandal) Jun ’12 Mar’12 7 7 masks done for 1st iteration. Optimize PECVD BSG and re-try the 7um trench filling with BSG( to achieve Nanosniff Sensor (Sachin) Owner: Sabiha Bkup:Siva Aug’12 continuous 5 Gold peeling resolved with new Cr target, Pt film blanket wet etch still patchy. Pt remolded target quality suspected. Continue 7th process run with Ti/Pt dry etch. Pilot run looks promising. IITGB Micro Needles (Bhushan) Jul’14 4” DSP wafers available, pending customer feedback on requirement.

INUP External Project Status(Oct’15) PI Owner Start Date ECD Mask Layers Status NAL Insulator Deposition and Etching (Prasanta Choudhury) Owner: Sabiha Bkup:Siva Aug’12 continuous NA 2 2” wfrs processed ( Oxide/Nitride deposition, RIE pad etch, PR strip and Pad resistance measurement),Pad resistance meets customer requirements, awaiting remaining 2 samples from NAL. BMSIT Gold electrodes( Sreedevi) Sep’15 1 Feasible, Process estimate provided. Payment process ongoing. IIT Madras Thermal Interface resistance measurement of thin films, like Graphene on substrates( Arvind) Feasible, process estimate provided, pending customer feedback.

INUP External Project Status(Oct’15) PI Owner Start Date ECD Mask Layers Status SNS college of Engineering Piezoelectric cantilever for energy harvesting( Sreeja) Owner: Sabiha Bkup:Siva Sep’15 Feasibility/customer requirements discussion on going Asarva chips/BNMIT Blood pressure sensor (Veena) Owner: Siva Bkup:Sabiha Feasible, Process estimate provided NIT Trichy Pressure Sensor(Sujan) Feasible, Process estimate provided,

INUP External Project Status(Oct’15) PI Owner Start Date ECD Mask Layers Status Delhi University DRIE processing( back side Si etch) Owner: Lava Bkup: Aditi Sep’15 Oct’15 Done, customer requirements met. Closed. Dr Anzari(IITDM) Cantilever project Owner: Sabiha Bkup: Siva Process estimate provided, pending customer feedback Dr Palash Basu(IIST Trivandrum,)Graphene FET Owner: Sangeeth Previous work has been done. To continue further

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