Terrence E. Zavecz Weir Temporal Response New TEA Systems Software Presentation from new Weir Temporal Analysis software

Yield Enhancement thru Modeling TEA Systems Overview Weir TR  Weir Temporal Response New Analysis Sections  Data Import  Plotting Temperature value vs time at each sensor site  Range controls  The Range plot  Temperature range vs High/low values  Phase analysis  Examination of constant vs rise/fall portions of the cycle  Phase graphics  By sensor, temperature and phase.  Contour Mapping  Of Temperature, rise times and Energy

Yield Enhancement thru Modeling TEA Systems Data import and sensor response Time-selection reduced analysis range Activation temperature is lower-limit of energy calculation Phase Threshold is used in the Phase Analysis to set sensitivity to thermal-rise slope change. Mouse-over curve shows time/ temperature. When a sensor curve is passed, a red square is generated. Red-square is replicated on each sensor’s thermal curve.

Yield Enhancement thru Modeling TEA Systems Analysis restriction Time has been restricted to 2,000 < time < 2405 seconds

Yield Enhancement thru Modeling TEA Systems Interactive graphics Red-box on curve marked by red- spot on “temp-variation vs time” wafer plot (right)  Simply hover mouse over top curve to move spot Notice “High” central range of wafer with low upper left & lower right

Yield Enhancement thru Modeling TEA Systems Variation from Wafer Mean Temperature Response uniformity at each probe Perfect uniformity is a horizontal line across the center of the circle. Time Variation from Mean Degrees Time 2560 sec

Yield Enhancement thru Modeling TEA Systems Phase Analysis – Primary Graph Press “Phase Tab” Phase graph shows:  Upper/Lower “red” temperature range at each point of process. (right ordinate )  Range in temperature at each time segment (left ordinate of graph with black squares)  Calculated Phase transitions with a yellow box at each phase time. Statistics are excerpts from the “RiseTimesPhase” spreadsheet. Temperature range of all sensors Max/min range measured Phase transition point

Yield Enhancement thru Modeling TEA Systems Range Plot Statistics show four thresholds which are plotted as yellow-filled squares. Range of data across time is plotted by blue circles Max Temp Min Temp Phase change Range

Yield Enhancement thru Modeling TEA Systems “RiseTimesPhase” spreadsheet Details each process phase (upper chart) Lower chart shows the range of values for the phase.

Yield Enhancement thru Modeling TEA Systems Reference variation across end of cycle

Terrence E. Zavecz Additional Phase-Analysis Graphics

Yield Enhancement thru Modeling TEA Systems Sensor Graphs Three libraries of graphics are created with the Phase Analysis.  Sensor Library  From “SensorResponse” spreadsheet  Details response of each sensor for the analysis  Rise Times Library  From “RiseTimes” spreadsheet  Details specifics about the range of time and temperature for each phase and phase- change.  Radial Library  From “RiseTimes” spreadsheet  Details process response as a function of the sensor’s radius on the substrate (wafer).

Yield Enhancement thru Modeling TEA Systems Time-cumeEnergy graph Shows the thermal energy injected into the substrate  E = (time * (Temperature-To)  To = threshold temperature One curve for each sensor To should be set the the Arrhenius threshold for the reaction. NOTE:  Any graph can be right-mouse clicked to edit the colors and display.

Yield Enhancement thru Modeling TEA Systems Temperature by sensor Range of temperature experienced by each sensor

Yield Enhancement thru Modeling TEA Systems Temperature variation from Phase mean Variance in temperature for each sensor  From the mean temperature of the phase

Yield Enhancement thru Modeling TEA Systems Cumulative Energy Integrated energy at each sensor  and the phase in which it occurred

Yield Enhancement thru Modeling TEA Systems Temperature Phase Error over time Phase error over time for each sensor

Yield Enhancement thru Modeling TEA Systems Rise-time slope over time Slope (deg/sec) as a funciton of time for each sensor

Yield Enhancement thru Modeling TEA Systems Slope vs Temperature Rise/Fall time slope vs Temperature Final temperature for each probe.

Yield Enhancement thru Modeling TEA Systems Locations of designated sensors on substrate Last tab in library

Terrence E. Zavecz Rise/Fall -Time Graphs Process Rise/Fall statistics

Yield Enhancement thru Modeling TEA Systems Cumulative energy Cumulative energy for each phase and sensor Threshold was set to 380 deg.  So temperatures below 380 deg yield no additional energy.  Note TC16 and TC2 who contribute very little.

Yield Enhancement thru Modeling TEA Systems Averge temperature for each phase

Yield Enhancement thru Modeling TEA Systems temperature Rise/fall for each phase

Yield Enhancement thru Modeling TEA Systems Time spent at each phase

Yield Enhancement thru Modeling TEA Systems Temperature at the start of the phase

Yield Enhancement thru Modeling TEA Systems Temperature at the end of the phase

Yield Enhancement thru Modeling TEA Systems Exact time of each phase transition start

Yield Enhancement thru Modeling TEA Systems Exact time of each phase transition end

Yield Enhancement thru Modeling TEA Systems Maximum slope experienced by the probe

Yield Enhancement thru Modeling TEA Systems Slope mean and Minimum for the probe

Terrence E. Zavecz Radial Response Library

Yield Enhancement thru Modeling TEA Systems Cumulative energy by Radial Position The Phase 3 fitted curve was added by right clicking on the graph and using the “Trend” tab

Yield Enhancement thru Modeling TEA Systems Various other graphs 2 nd order curves fitted to each phase

Yield Enhancement thru Modeling TEA Systems Uniformity Plots Selected 4 times for display:  1800 sec (345 deg)  2295 sec (379 deg)  2400 sec (400 deg)  2560 sec (400 deg)

Yield Enhancement thru Modeling TEA Systems Full screen setup

Yield Enhancement thru Modeling TEA Systems Individual displays

Yield Enhancement thru Modeling TEA Systems Plots with gridlines for transitions displays

Yield Enhancement thru Modeling TEA Systems Another thermal matrix

Yield Enhancement thru Modeling TEA Systems Animation and control of thermal swings 1.Select the time-slices for plotting. 2.Select the method of display. 3.Press “Create maps” to display contour plots. 4.After display, then the maps can be viewed individually. 5.Select either “One plot per screen” to view video of thermal display. 6.Animation control manages video presentation.

Terrence E. Zavecz Weir Temporal Response for Full Analysis Sequence

Yield Enhancement thru Modeling TEA Systems Thermal response ranges

Yield Enhancement thru Modeling TEA Systems

Yield Enhancement thru Modeling TEA Systems Range across the wafer

Yield Enhancement thru Modeling TEA Systems Average times for each phase

Yield Enhancement thru Modeling TEA Systems Statistical ranges of each phase

Yield Enhancement thru Modeling TEA Systems Matrix Display

Yield Enhancement thru Modeling TEA Systems Rise Times Rise times plotted at 8 times over critical final rise Notice initial rise on left side of wafer at 2295 seconds with a slope range from to dec/sec rise

Yield Enhancement thru Modeling TEA Systems Plotting Energy, Rise Times and Cumulative Energy Select data type with drop-down control

Yield Enhancement thru Modeling TEA Systems Threshold Analysis data Data from the “RiseTimesPhase” worksheet for 16 sensors Transition points are marked on the thermal curve as black squares with a yellow center (previous slide) Temperature variation