SPECTRAL PRODUCTS INTRODUCTION 111 Highland Drive, Putnam, CT 06260, USA (East Office) 2659A Pan American Freeway NE, Albuquerque, NM 87107, USA (West Office)

SPECTRAL PRODUCTS 2015 INTRODUCTION 1972  Founded CVI Laser Corp in Albuquerque, NM to make high power laser coatings near Sandia and Los Alamos National Labs  Won the US National Small Business of the Year Award  Started CVI Instruments Division producing computer controlled monochromators (the first total microprocessor-controlled and direct drive scanning type)  Started Spectral Products division producing miniature spectrometers  Sold CVI Laser  Continued Spectral Products in Putnam, CT & Albuquerque, NM  Founded Korea Spectral Products (KSP) in Seoul, S. Korea 2004  Developed OES systems for in-situ monitoring plasma deposition process control in semiconductor industry  Provided multi-channel OES systems to SAMSUNG Electronics production lines (~ sets, ~ spectrometers) through KSP  Provided SPOES (Self Plasma Optical Emission Spectroscopy) systems to semiconductor industry (SAMSUNG, LG-Philips, Hynix)  Developed analyzing system for measuring the concentration of total N, total P, and total K from livestock’s liquid type waste using IR spectrometers.  Began to provide NPK analyzers to the Rural Development Administration of S. Korea and its national labs through KSP 2009  Developed high performance spectrometer systems f or in-situ measurement of LED characteristic on wafer stage and provided them to semiconductor industry (SAMSUNG) through KSP 2010  Developed the UV-VIS spectroscopic system for measuring maturity of liquid type fertilizer (livestock’ waste) 2011  Provided the liquid fertilizer maturity measurement systems to the Rural Development Administration of S. Korea and its national labs through KSP 2012  Developed the SROES (Spatially Resolvable Optical Emission Spectrometer) and provided them to semiconductor industry (SAMSUNG) through KSP 2014  Developing High-speed screening apparatus for a Raman analysis-based high- speed multiple drug with Korea Research Institute of Chemical Technology in S. Korea through KSP Technical Leader in Spectroscopy World

OES, EPD Color UV/VIS NIRS Mid-IR Raman Semiconductor BT & NT Environment LED & OLED Field Of Business SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Traceable Optical Alignment & Calibration NIST SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Manufacturing & Quality Control SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Mechanical Design and Optimization Opto SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Electronics Design for Sensor and Optical System SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Optical System Design and Simulation SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Measurement and Analysis Software SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

R&D of Optical Measurement System SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Spatial Resolution by location Spatial Resolution SPEA™400A Commercial and Applicable SPEA System in Real Production Field Automatic SPEA System for Diagnosis & In-Situ Monitoring Plasma Uniformity Based OES & EPD Physical Dimensions248.5mm X mm X 86.5mm Weight3.2 Kg Optical Input system Measurement Scanning range350mm ~ 4000mm Spatial Resolution20mm ~ (Depends on Setup & Distance) Wavelength RangeMax. VIS Max. UV Power requirement Source voltage V, Hz Power consumptionLess than 50W Environment condition Temperature range 0 ℃ - 50 ℃ Maximum Humidity 40 ℃ - 50 ℃ : ≤60% SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

In semiconductor manufacturing, spectrometers are used for measuring the emission spectrum from a plasma chamber in real time and for diagnosis of manufacturing processes and analysis of materials such as optical emission spectrometer (OES) and end point detection (EPD). OES & EPD SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Colorimetry & Photometry As the LED, OLED and display business grows, it becomes very important to measure and analyze the colorimetric and photometric characteristics of them. Spectral Products have been providing the measurement systems for analyzing the colorimetric and photometric values of various samples. With SP's spectrometers and some accessories, the optical properties of various colors in the CIE color coordinates can be achieved easily. SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Spectrometers are being used in the manufacturing of semiconductor and display devices, optical monitoring system of optical coatings, and surface plasma resonance (SPR) systems. Wide range of selections for our spectrometers and monochromators makes it possible to build spectroscopic ellipsometer systems efficiently. Film Thickness Measurement SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Fluorescence Raman Spectroscopy The measurements of fluorescence, phosphorescence, and opto-chemical emission spectrum are required in many applications like organic and inorganic fluorescence property studies, chemical property analysis, and the research for the components and their lifetimes of some gases. Spectrometer systems are the basic instruments for measuring Raman scattering in the chemical components analysis, the researches for the structure, stability and biological properties of various materials. SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World

Environment SM301-FCM [NPK Analyzer for liquid fertilizer] No need for physical and/or chemical pre/post treatment Can measure the total N, total P, and total K in a couple minutes at the same time Compact and portable LMQ2000 [Liquid Fertilizer Maturity measurement system] Measuring maturity of liquid type fertilizer Manufactured for the first time in the world and can be industrial standard Can measure “ammonia” and “hydrogen sulfide” in real time SPECTRAL PRODUCTS 2015 INTRODUCTION Technical Leader in Spectroscopy World