Zeiss Neon 40 EsB Sample Insertion/Removal

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Presentation transcript:

Zeiss Neon 40 EsB Sample Insertion/Removal Close the column chamber valve and make sure sample stage is at the exchange position Click on ‘Close Column Chamber Valve’ under the Airlock panel Using the ChamberScope, make sure sample stage is at 0o tilt and lowered out of the way of the SEM/FIB columns Under the Stage Points List panel, double click on $exchange to drive the stage to the exchange position

Zeiss Neon 40 EsB Sample Insertion/Removal Load samples (or not if removing) and evacuate the airlock While wearing gloves pick an appropriate stage and load the samples Open the airlock door (swivel the monitor out of the way) and fit the dovetail stage securely onto one of the two teflon holders On the airlock, the red ‘Wait’ light should be lit as well as the yellow ‘Rod Status’ and ‘Gate Closed’ lights While holding the chamber door closed, push the ‘Pump’ button (green light on) followed by the ‘Open’ button (green light on) When the green ‘Proceed’ light turns on and the yellow ‘Gate Closed’ light turns off, wait until the gate valve fully opens (~30 seconds, look for motor rolling to cease) and the sample chamber lights up

Zeiss Neon 40 EsB Sample Insertion/Removal Insert or remove the specimen stage from the SEM chamber If necessary, line up the sample insertion rod with the position of the sample using the knob underneath the rod Release the lock on the sample insertion rod and carefully screw the sample insertion rod into the stage Be careful not to push the stage off the holder and do not over tighten the rod Insert the sample into the SEM chamber fitting the dovetail stage onto the holder securely Unscrew the sample insertion rod from the sample holder (Rod Status light should be solid yellow, not blinking otherwise system will not proceed to the next step), retract it all the way and lock it into the fully withdrawn position

Zeiss Neon 40 EsB Sample Insertion/Removal Vent the airlock to atmosphere and open the column chamber valve Release the ‘Open’ button (green light off) and push the ‘Close’ button (green light on) to close the gate valve Wait until the ‘Gate Closed’ yellow light comes on Release the ‘Pump’ button (green light off) and then the ‘Close’ button (green light off) Push the ‘Purge’ button (green light on) to vent the airlock to atmosphere The red ‘Wait’ light will turn on When the airlock is fully vented (~ 10 seconds), release the ‘Purge’ button (green light off) Open the column chamber valve on the Airlock panel