MEMS in SoC 應力所 r90543064 江宏仁. Embedded Systems Copyright 2000, Naresh R. Shanbhag.

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Presentation transcript:

MEMS in SoC 應力所 r 江宏仁

Embedded Systems Copyright 2000, Naresh R. Shanbhag

Sensor(MEMS) ->DSP(Circuits, Architectures, OS, Com-piler, Networks -> Actuators (MEMS). mobile/wireless automotive systems(navigation, safety andentertainmentsystems) medical sys-tems(hearing aids) etc. MEMS in SoC

Commercial MEMS Products Texas Instruments’ Digital Micromirror Display

RF MEMS Applications

Cell Phone Components

Coupled Resonator System

Two Coupled Vertically Driven Resonator

MEMS-Enabled Miniature Wireless Transceiver

What if you needed,or wanted,adjustable bandwidth or centerfrequency on the input filters? ->Use multiple filters &switches ->Semiconductor/active filters ->Varactor-tuned filters

Some RF mems

Reconfigurable Antennas

Analog IC Design Flow

MEMS IC Design Flow

The Top Down Design Process for MEMS System architect MEMS, packaging, analog and digital designers IP Custom Level Design New MEMS in New Process Goal: A New MEMS component Semi-Custom Design Existing MEMS in New Process Goal: A Better MEMS component Standard/IP Re-Use Existing MEMS and MEMS Process Making Existing MEMS Available to IC level Designers to Build new systems

IP approach

Appropriateness  Does the offered MEMS design IP supply exactly what is needed? Portability  How does one move MEMS design IP from development fab to manufacturing fab Yield  How will an IP based MEMS design yield in actual manufacturing and how predictable is this? Reliability  How can one predict the reliability of a MEMS IP design under application specific stresses and challenges. Issues with an IP approach

Coupling Effects

3D Device Modeling Available in MEMS today *Structural Mechanics (including contact) *Electrostatics & Capacitance Extraction *Thermo-mechanics *Coupled Electro-Thermo-Mechanics (including contact) *Thermal Flow Analysis *Piezoresistive Devices *Electro-Thermal Devices *CFD for Compressible and Incompressible Flow *Electrokinetics and Chemical Transport in Liquids *Damping of complex structures Electrokinetic Switching for Chemical Transport

Coventorware from Coventor – www. memcad. com IntelliSuite from Intellisense Inc. – www. intellisense. com MEMS ProCAETool from Tanner Inc. – www. tanner. com MEMScap from MEMScap Inc. – www. memscap. com SOLIDIS from ISE Inc. – www. ise. com Commercially Available Software

Layout and process Topography simulation Boundaries, IC process results and Material properties Mesh generation Device simulation System- Level Simulation Outline of the Task Sequence

*MEMS will play important role in SoC *MEMS/MST tools exist today. *The Tools can support the design of RF devices and systems. *The Design Process needs to support the integration of MEMS and ASIC subsystems. *ALL players in the design process (Architect, Analog, Digital, MEMS, Package) must communicate. Summary

Referenece *Microcosm Technologies *University of Texas at Arlington Course EE 5349/ *UC Irvine *berkeley EE143 Microfabrication Technology Fall 2002 Lecture Notes www- inst. eecs. berkeley. edu/~ ee143/