Prabhakara Rao February 9 , 2016 National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India Cleanroom Admin Committee Meeting Prabhakara Rao February 9 , 2016

Reports December month charges CeNSE users charged 82% of total value 146 Users - Total charges at a high of 24.6 L 18 NON-MITO users (Paid Users) - Total charges of 1.9 L 128 MITO084 users - Total charges of 22.6 L 90 users from CeNSE - Total charges of 20.2 L CeNSE users charged 82% of total value

Reports Data April-15 May-15 June-15 July-15 Aug-15 Sep-15 Oct-15 Nov-15 Dec-15 Total Users 97 110 120 103 113 122 151 179 146 MITO084 users 79 91 95 80 87 93 159 128 Non-MITO Users 18 19 25 23 26 29 20 Total users from CeNSE 55 63 60 52 61 64 76 85 90 Total charges for MITO084 18.75 L 15.5 L 22.25 L 22.47 L 22.18 L 25.7 L 27.3 L 33.7 L 22.6 L Total charges for Paid users 2.3 L 1.86 L 2.5 L 2.95 L 3.54 L 4 L 3L 1.5 L 1.9 L

April 2015 - Nov 2015 - INUP project Status Summary completed 30 ongoing 2 Pending 32

Minutes of the Last Meeting-Jan 5th,2016 Camera repositioning outside the CeNSE building has to be done without compromising safety. Maintenance Log for utility is Discussed .It should be made available for all the tools. Protocols should be listed out saying which equipment should be On & OFF according to the Power supply availability. Necessity of AMC for Electrical Panel is discussed and felt not required. Demonstration is needed for Fire Alarm System plan. There should be a backup Facility Technologist for every tool.

Equipment's to be On & OFF according to the Power supply availability. Whenever raw power not available: DG-1 500 KVA-Utility UPS 1,2,3 DG-2 500 KVA-Utility DG-4 500 KVA-Chiller 1& Litho AHU-1,Chilled Water pump DG-3 320 KVA –UPS4 CeNSE Not to be switched On: Utility- AHU 2&3,Chiller-2&3,Lift CeNSE- Chiller,Lifts,Other Lab equipment's

Orientation Program was conducted on Feb 1st & 2nd ,2016 Total No of Participants: 50 Topics Covered: Introduction to Clean room  procedures ,FOM networks Wafer Cleaning and wet processing High temp growth and deposition ( Oxidation, doping, LPCVD, RTP) Plasma processing and Dry etch Lithography PVD ( Sputtering and Evaporation),ALD

CeNSE Faculty Funds From April-Nov,2015 S.No Date Invoice PI Amount in Rs. 1 03.06.2015 CeNSE/PI_rp-4/2015-16 Prof. Rudra Pratap 84,304.00 2 12.6.2015 CeNSE/PI_SRaghavan/2015-16 Prof. S. Raghavan 2163753 Received in 2015 3 10.12.2014 CeNSE/PI_Vijaymishra -1/2014-15 Vijay Mishra 612,365.00 4 16.12.2014 CeNSE/PI_Vijaymishra -2/2014-15 51,000.00 7 14.9.2015 CeNSE/PI_rp-6/2015-16 Prof.Rudra Pratap 900,000.00 Total Amount – Rs.38,11,422.00

External Projects/Services Completed Upto Nov,2015 Sl.no Organization Project/Services Amount in Rs 1. SITAR Bangalore Gold Evaporation 2,00,000 2. TIFR Microfluidics SU8 master 22,000 3. Delhi University DRIE work 91,000 Total Amount – Rs. 3,13,000

Penalty Points (Nov-2015-Jan- 2016) Date Name Designation Professor Department Penalty points CumulativePoints Remarks Suspension Status 1 4/11/2015 Amiya Banrejee Graduate Prof.Srinivas Vasu Raghavan CeNSE 15 Violation of wet bench Protocols 2 9/11/2015 Sandeep vura Violation of protocols Removed the access from cleanroom (9thNov-15 thNov) 3 10/11/2015 Nivedita Basu Prof. Navakanta Bhat Not Switching off the tools 4 23/11/2015 Vineet Kumar Singh PHD Student Prof. Sushobhan Avasthi 30 60 For not wearing goggles and using without booking slot. Removed the access from cleanroom( 23rd Nov- 29th Nov2015) 5 26/11/2015 Vishal Baloria Violation of Protocols Removed the access from cleanroom (26thNov - 9thDec 2015) 6 27/11/2015 Nithin Bhandari Prof.KN Bhat Not using goggles in litho wet benches

Penalty Points S.No Date Name Designation Prof. Department Cumulative Points Remarks Suspension Status 7 27/11/2015 Anushree T.Srinivas ECE 15 Not using goggles in litho wet benches 8 Debadrita Paria Graduate Dr.Ambarish Ghosh Physics 9 Nayana ramesh Post Doc Prof.Srinivas vasu CeNSE For not wearing goggle in litho wet bench 10 Anumitra Sil Prof.Anil kumar 11 30/11/2015 Samatha Benedict PhD Student Prof.Navankanta Bhat 35 12 Ajay Dangi Prof.Rudra Pratap 115

Penalty Points S.No Date Name Designation Prof. Department Cumulative Points Remarks Suspension Status 13 1/12/2015 Samatha Benedict PhD Student Prof.Navankanta Bhat CeNSE 15 50 For not wearing goggle in litho wet bench Removed the access from cleanroom(1st Dec-7th Dec) 14 Chandan Kumar Graduate Prof.Anindya das Physics 3/12/2015 Nalla Somaiah Prof.Praveen kumar Materials Engineering 16 4/12/2015 Swanand Solanke Prof.Digbijoy Nath 17 5/1/2016 Chandan Samatha Prof.Akshay Naik 18 Parameshwar

Penalty Points S.No Date Name Designation Prof. Department Cumulative Points Remarks Suspension Status 19 6/1/2016 Jafar hasan Post Doc Prof.Kaushik Chaterjee Material Engineering 15 For not wearing goggle in litho wet bench 20 Swapnil More Graduate Prof.Akshay Naik CeNSE 21 11/1/2016 Meera Garud Prof. Rudra Pratap Violation of Protocols 22 25/1/2016 Ajay Dangi Prof.Rudra Pratap 30 Failed to follow standard operating procedures while handling spin coater. Independent status of spin coater is suspended for two weeks from 25 th jan,2016 to 7 th feb 2016. 23 Anisha Kalra Prof.Digbijoy Nath Failed to cleanup equipment work space after the slot Independent status is suspended 24 27/1/2016 Awanash Pandy Prof.Shankar K Selvaraja For not wearing the goggles in litho wet bench.

BMS Re-configuration Stage 1 Stage 2 Stage 3 PRESENT STATUS NEED TO BE CALIBRATED Stage 3 DESIGNED BUT NOT CONNECTED BY PROJECT TEAM. CRITICAL AND NOT WORKING No.of items which were not working No.of items rectified 17 No.of items which were not working No.of items rectified Remarks 13 10 Material required No.of items which were not working No.of items rectified Remarks 42 14 Time period required

Jan 2016’s work Fail proof alarm and trip system Fire alarm is integrated with BMS, GMS and Biometric. The system is configured to switch off biometric, Alarm GMS and BMS when ever the fire alarm is triggered.

Time limits Date of under taking the work : 14-08-15 Stage 1 Target date:04-09-15 completion date :04-09-15 Stage 2 Target date:18-09-15 completion date:18-09-15 Stage 3 Target date: 31-10-15 Since stage 3 includes not connected items and it is a learning process, we need some more time to act on all other incomplete works. For some items we need to purchase material, Planning to take a quote at once after finalizing the list of requirement.

Details on remaining items As per our understanding some of the items in list are not required. Please suggest The current status of each item is listed in next slides. We need 2 more months to completely act on remaining items.

Equipment Action point remarks CDA Remote Start/Stop Command Not required Pressure Reading Need to check with vendor for availability to connect Flow Absorbtion Dryer1 On/Off Status Trip Alarm Ultra Pure Water Flow sensor and cabling required Resistivity Need a signal splitter Process Vacuum P1&P2 cabling Need a sensor and cabling

Need to check the signal availability in sensor HF&Acid Alkaline level Equipment Action point remarks WWT-Fluoride PPM Fluoride Need to check the signal availability in sensor HF&Acid Alkaline level Need to install level sensors and cabling HF Sump Pump Remote Start/Stop Command Not required On/Off Status Trip Alarm Alkaline Sump Pump Diesel Generator Voltage Vendor involvement required Ampere Raw Power Cabling

Lithography Bay 9th February, 2016 Equipment's: •Laser writer, MicroTech •Laser writer, Heidelberg •EVG Mask aligner •MJB4 mask aligner •EVG Bonder •E‐Line system •Pioneer E‐beam system Gopal

Litho Equipment’s Utilization Chart – January-2016

Maintenance Issues: All Litho tools are up

Furnaces and wet benches Savitha P

Dry Etch & Thin films & Process Integration Feb 9th,2016 Sunanda Babu

Equipment Utilization Techport Sputter 2: Tool down for 3-position Gate valve and heater transformer installation, new gate valve helps to save on gas and turbo pump life. PECVD: User broke wafer causing tool downtime.

Equipment Utilization Beneq ALD: (Tool owner: Advaitha)Ozone generator installation done with extensive help from Raghu and Mirji.

INUP External Project Status(Jan’16) PI Owner Start Date ECD Mask Layers Status TWT SWS Owner: Siva Bkup:Sabiha Jun’15 May’16 2 First prototype device handed over to customer Accelerometer Jun ’12 Mar’16 7 IIT Mumbai for CMP option being explored.(visited IITB, CMP still not done, IITB thickness means tool may need fine tuning for thick oxides, measurements ongoing. Micro heater Owner: Sabiha Bkup:Siva Aug’12 continuous 5 9th visit done, 2 wafers processed with 74% and 90% yield. Achieved by teamwork between NNfC and Nanosniff( membrane oxide recipe obtained from Nanosniff and processed at NNfC on First Nano furnace) Micro Needles Jul’14 4” DSP wafers available, pending customer feedback on requirement.

INUP External Project Status(Jan’16) PI Owner Start Date ECD Mask Layers Status NAL Insulator Deposition and Etching (Prasanta Choudhury) Owner: Sabiha Bkup:Siva Aug’12 continuous NA 2 2” wfrs processed ( Oxide/Nitride deposition, RIE pad etch, PR strip and Pad resistance measurement),Pad resistance meets customer requirements, awaiting remaining 2 samples from NAL. BMSIT Gold electrodes( Sreedevi) Sep’15 Feasible, Process estimate provided. Payment process ongoing. IIT Madras Thermal Interface resistance measurement of thin films, like Graphene on substrates( Arvind) Feasible, process estimate provided, pending customer feedback. Current request for wire bonding on some samples.

INUP External Project Status(Jan’16) PI Owner Start Date ECD Mask Layers Status SNS college of Engineering Piezoelectric cantilever for energy harvesting( Sreeja) , PhD project. Owner: Siva Bkup:Sabiha Nov’15 4 Initial discussion with student. AlN replaces PZT as piezo material. Need optimization of AlN film in Sputter-2. Pending more feedback from Requestor. Asarva chips/BNMIT Blood pressure sensor (Veena) Sep’15 Feasible, Process estimate provided NIT Trichy Pressure Sensor(Sujan) 8 Feasible, Process estimate provided. Design and Verification process started on 8th Feb, 2016. Dr Palash Basu(IIST Trivandrum,)Graphene FET Owner: Sangeeth Bkup: Siva Oct’15 Previous work has been done. To continue further. Requires Al2O3 characterization. Samples handed over to User(8th Feb, 2016) for Terahertz testing at TIFR,Mumbai. Dr Anzari(IITDM) Cantilever project Owner: Sabiha Process estimate provided, pending customer feedback

INUP External Project Status(Jan’16) PI Owner Start Date ECD Mask Layers Status MSRIT RF MEMS switch(2014-2015 (Laxmi) Owner: Siva Bkup:Sabiha Oct’14 May’15 4 Closed Delhi University DRIE processing( back side Si etch) Owner: Lava Bkup: Aditi Sep’15 Oct’15 NA Closed. Cr/Au Deposition for SITAR(e-beam evaporation) Owner: Chandra Bkup: Suresh ongoing Cr/Au(10nm/20nm)-8 6” Si wfrs Cr/Au(60nm/100nm)-6 6” glass wfrs Cr/Au (10nm/20nm)- 2 6” Si wfrs Cr/Au ( )– 4 6” glass wfrs Microfluidics TIFR Hyderabad Dr Seshagiri Rao( Fabrication of SU8 master mold) Owner; Sabiha Bkup: Sangeeth Nov’15 1 Closed. User was extremely satisfied with results, using the SU8 mould. New request raised with a slightly more complex design for mould preparation in Silicon

Thank you