Thorium Dioxide (ThO2) And Its Optical Constants in The Extreme Ultraviolet Elise Martin & David Muhlestein
Astronomy The sun in the Extreme Ultraviolet
Plasma Diagnostics UC Davis Plasma Diagnostic Group (PDG)
Other Uses Photolithography Photolithography Microscopy Microscopy
The Sputtering Process
Berkeley, California Berkeley Provo
Fitting
Bad Fit
Good Fit
The Index of Refraction δ =1-n=real part of index of refraction affects wavelength affects wavelength β =k =imaginary part of index of refraction affects attenuation affects attenuation
Attenuation due to β
Delta vs. Wavelength
Beta vs. Wavelength
Why is ThO 2 important? - Small β and small δ means ThO 2 makes a good spacer layer for multilayer mirrors - Easily made compared to other materials
Acknowledgements Niki Farnsworth Niki Farnsworth Dr. Steven Turley Dr. Steven Turley Dr. David Allred Dr. David Allred The BYU Thin Films Research Group The BYU Thin Films Research Group The Advanced Light Source The Advanced Light Source