MEMS for Adaptive Optics

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Presentation transcript:

MEMS for Adaptive Optics Adaptable-Mirror Section Movable Mirror Elements Scale ~10s to 100s mm Array of Elevating Mirrors Mirror Substrate Scale ~ mm to cm Current-Driver Electronics Solder-Bump Electrical Connections Conceptual slide Specs: 20um vertical actuation mirror diameter < 200um -3dB roll off frequency > 20Hz CMOS compatible process desired tilable

How Can We Elevate the Mirror Elements? Magnetic Actuation Solenoidal structures Electrostatic Actuation Vertical comb-drives Thermal Actuation Thermal-bimorph structures Our initial design approach

Berkeley Bimorph Process Single-mask process Low-stress nitride (SixNy) and aluminum bimorph Other processes under consideration Hidden actuators Electrostatic actuators Bonded mirrors Current path Mirror Mirror Die photo - actuated, released mirrors

Conclusions Bimorph actuator is small and can be fabricated under the mirror Fill factor > 98% Bimorph actuators can be tiled in an arrays to actuate large numbers of mirrors Bimorph actuator provides large tip deflection (h = 10 mm) Models show frequency requirements are met (f>1 kHz) Bimorph actuators have been fabricated Testing is underway