1. Jongbaeg Kim, Dane Christensen, and Liwei Lin
2-D Scanning Mirror Using Plastically Deformed Angular Vertical Comb Drive Actuator
Jongbaeg Kim, Dane Christensen, and Liwei Lin
Berkeley Sensor and Actuator Center
TRANSDUCERS’05
The 13th International Conference on Solid-state Sensors, Actuators and Microsystems, vol. 1, pp
Teacher：Cheng-Hsien Liu
Reporter：Chao-Min Chang
Date：

2. PME5230 Class Presentation I
Outline
Introduction
Design and Fabrication
Experimental Results
Conclusion
PME5230 Class Presentation I

3. Digital Micro Mirror Device PME5230 Class Presentation I
Introduction
Digital Micro Mirror Device
Texas Instruments
MICROVISION
PME5230 Class Presentation I

4. PME5230 Class Presentation I
Introduction
Angular Vertical Comb
Wibool Piyawattanametha & Ming C. Wu. et al
J.MEMS Vol. 14, NO. 6. pp , 2005
Comb Drive
Angular Vertical Comb
Post fabrication process of the 2-D AVC scanner.
PME5230 Class Presentation I

5. PME5230 Class Presentation I
Introduction
Other method
J. Hsieh and W. Fang, Transducers’99, Sendai, Japan, 1999, pp
PME5230 Class Presentation I

6. PME5230 Class Presentation I
Design
Symmetric double sided vertical comb-drive (DSVCD) design.
Schematic view of the plastically deformed 2-D scanning mirror actuator with self-aligned vertically interdigitated comb sets.
PME5230 Class Presentation I

7. Fabrication Process flow for plastically deformed vertical actuators.
Lid Wafer
Batch-processed plastic deformation of microactuator torsion bars
Process flow for plastically deformed vertical actuators.
PME5230 Class Presentation I

8. PME5230 Class Presentation I
Lid Wafer & Plastic Deformation
Top view and side view of micropillars and electrodes fabricated on the lid wafer.
PME5230 Class Presentation I

9. Design and Fabrication PME5230 Class Presentation I
Process results
SEM picture of close-up view of mirror, gimbal, and electrical isolation trenches.
PME5230 Class Presentation I

10. PME5230 Class Presentation I
Experimental results
arbitrary number
PME5230 Class Presentation I

11. PME5230 Class Presentation I
Experimental results
Frequency response of gimbal and mirror of the 2-D scanning mirror actuator.
PME5230 Class Presentation I

12. PME5230 Class Presentation I
Conclusion
This paper has demonstrated microfabricated monolithic 2-D scanning mirrors using a three-mask process on SOI wafer with a single plastic deformation step.
The measured dynamic characteristics show resonant frequencies of and 1.54 kHz with optical scanning angles up to 27° and 20° with respect to mirror and gimbal axes, respectively.
After 90 days of full-time operation, the scan angle deviations in each directional motion are negligible and we believe the 2-D actuator is reliable.
PME5230 Class Presentation I

13. Thank you for your listening! PME5230 Class Presentation I

14. Electrostatic scanning micromirrors using
localized plastic deformation of silicon
Process flow for the self-aligned plastic deformation using localized heating to make scanning micromirrors.
PME5230 Class Presentation I

15. Electrostatic scanning micromirrors using
localized plastic deformation of silicon
PME5230 Class Presentation I