1. Internal Use Only / GRW205A 201218 19:43 Bypass closing Leak check 1 hr, 5.78E+0~1.50E+1 Bypass closed~Gate open Leak check 30mins, 5.78E+0~1.27E+1

2. Internal Use Only / GRW205A 20130101 19:43 Gate closing Gate closing Gate closed Delay time??Gate closed?? 若從 message 來看, 在 gate closing 的過 程中, 壓力就已經開始 trend up, 但需驗 證是否 message 有 delay time WRG Trend up 3.33E-5~6.01E+1 7mins

3. Internal Use Only / GRW205A 201221 09:00 ~ 20121222 09:00 若証明 WRG 是在 closing 的過程中就 Trend up, 懷疑馬達 seal 不好, 轉動時造成 leak 或 gate valve 與機台的 seal 在 close 瞬間有 damage.

4. Internal Use Only / GRW205A 20130108 00:37 Gate closing--anneal WRG set off Gate close & diffusion pump on

5. Internal Use Only / Rotary off Gate off Diffusion off GRW205A 20130125 13:22 Gate closing Change WRG(new) 上機 S/N:126185924 下機 S/N: 126065267 For gate valve close 壓力會 peak 以及 rotary off 壓力會持續下降