1. Multilayer Microfluidics ENMA490 Fall 2003 Brought to you by: S. Beatty, C. Brooks, S. Dean, M. Hanna, D. Janiak, C. Kung, J. Ni, B. Sadowski, A. Samuel, K. Thaker

2. Problem Definition Motivation –BioMEMS research is growing rapidly, but restricted to single layer microfluidics –Development of a multilayer microfluidic design would increase flexibility Goal –Design, construct, and test a controllable microfluidic device with at least two fluid levels. –Identify appropriate materials, processes, and device geometries.

3. Problem Scope Requirements –To make a two-level microfluidic device –To incorporate active control elements Constraints –Assume external fluid control –Neglect biochemical reactions in channels –Keep design feasible for manufacturing

4. Initial Material Choices Narrowing Materials Choices Desired Mechanical and electrical properties Process considerations

5. Project Development

6. Device Design: Stage 1 (Initial Microchannel Design Concept) Device Logic

7. Device Design: Stage 1 (Initial Microchannel Design Concept)

8. Device Design: Stage 2 (Modified Microchannel Design) Device Logic

9. Device Design: Stage 2 (Modified Microchannel Design)

10. Manufacturing and experimental results

11. Device Design: Stage 3 (Pressure Actuated Valve Design) Device Logic

12. Device Design: Stage 3 (Pressure Actuated Valve Design)

13. Simulation PDMS deflection

14. Device Design: Stage 3 (Pressure Actuated Valve Design) Flow modeling

15. Device Design: Stage 3 (Pressure Actuated Valve Design) Manufacturing and experimental results

16. Alternative Designs

17. Future Work

18. Summary