1. Sputtering

2. Why? Thin layer deposition How? Bombarding a surface with ions which knocks out molecules from a target which in turn will redeposit onto a surface

3. Target Sputtering + + - - + - + Plasma + - + - + - + - + - + - + - - - + - + -

4. Target Sputtering + + - - + - + Plasma + - + - + - + - + - + - + - - - + - + - Surface

5. Reflection Compare with evaporation – what is the main differences? Between which physical states does a molecule go? In what respect is the process similar to dry etching?