1. 1 Plenty Energy Clean Environment Healthy Life ICABU 2013 Invited Talk Industrial Applications in KOMAC by Accelerator Technology 2013. 11. 11 Jae-Sang Lee KOrea Multi-PURPOSE Accelerator Complex, Korea Atomic Energy Research Institute, Korea

2. 2 Plenty Energy Clean Environment Healthy Life I I Overview III II Status & Achievement (Ion Beam Facility Development) Contents IV Summary Summary Status & Achievement (Industrial Application by Ion Beam Facility)

3. 3 Plenty Energy Clean Environment Healthy Life Commercialization To develop a High Power Proton Linac (100MeV, 20mA) To develop Beam Utilization & Accelerator Application Technologies Industrialization Developed Technologies 3 MeV RFQ LEBT Ion Source 20 MeV DTL Qudrupole Magnet RFQ Accelerator (Power Semiconductor, SOI etc.) MeV Accelerator (Bio-Medical Application etc.) Micro-beam Equipment (PIXE, TOF-ERD etc.) Overview Project Objectives Development of fundamental Surface Treatment Technology for Industrial Application by using Accelerator Application Technology Accelerator Application

4. 4 Plenty Energy Clean Environment Healthy Life Status & Achievements (Ion Beam Facility Development)

5. 5 Plenty Energy Clean Environment Healthy Life Duoplasmatron (50 kV, 10 mA, N + ) Ion Source Development High current ion source is very useful and essential for industrialization and mass production in the industrial fields. KOMAC has developed Duoplasmatron, DuoPIGatron, Metal Ion Source(Burnas type), High Current Ion Source(Bucket type) during last 10 years. We made some success of 100mA, 50kV DuoPIGatron and 200mA Bucket type ion source for industrial application. Some part of developed ion source technologies was transferred to the company. DuoPIGatron (30 kV, 10 mA, N + ) DuoPIGatron (50 kV, 50 mA, N + ) DuoPIGatron (50 kV, 100 mA, N + ) Burnas Ion Source (20 kV, 10 mA, Co + ) Bucket Ion Source (20 kV, 200 mA, Ar + )

6. 6 Plenty Energy Clean Environment Healthy Life Developed a 300 keV, 5mA ion implanter and delivered to ARTI as a turn-key base project. All technologies have been transferred to ISYS Co. Industrialization of Ion Implanter  Gaseous Ion Implanter ▪ Available Ions: H, He, N, Xe, etc ▪ Acc. Voltage: 150 kV (max.) ▪ Beam Current: 10 mA (N + standard.) ▪ Uniformity: ±10% ▪ Irrad. Area: 6” dia.  Dual Ion Implanter ▪ Available Ions: H, He, N, Xe, etc ▪ Acc. Voltage: 100 kV (max.) ▪ Beam Current: 50 mA (N + standard.) ▪ Uniformity: ±10% ▪ Irrad. Area: 300mm dia.  Metallic Ion Implanter ▪ Available Ions: Ti, Mg, Mn, Cr,etc ▪ Acc. Voltage: 150 kV (max.) ▪ Beam Current: 2 mA (max.) ▪ Uniformity: ±10% ▪ Irrad. Area: 10x10 cm Ion Implanters Developed by KOMAC Ion Beam Facilities in KOMAC (Equipment Comparison] MakerSpec.Price VARIAN (USA) 260keV/2mA6.2M$ Axcelis (USA) 600keV/1mA6.2M$ ULVAC (Japan) 300keV/5mA3.5M$ KOMAC (Korea) 50keV/100mA0.7M$ 300keV/5mA0.9M$ [Ion Implanter Production Permit (1 ST in Korea, 2012)]

7. 7 Plenty Energy Clean Environment Healthy Life  IBAD Equipment Transferred to Samsung Electronics Co. ▪ Provided Ions: N+N+ ▪ Acc. Voltage: 15 kV (max.) ▪ Beam Current: 10 mA (N + standard.) ▪ Uniformity: ±10% ▪ Irrad. Area: 10cm in dia  Ion Implanter Transferred to Hasung e-sis Co. ▪ Provided Ions: N+N+ ▪ Acc. Voltage: 100 kV (max.) ▪ Beam Current: 20 mA (N + standard.) ▪ Uniformity: ±10% ▪ Irrad. Area: 35cm in dia  Ion Implanter Transferred to Accel Korea Co. ▪ Provided Ions: N +, Ar + ▪ Acc. Voltage: 50 kV (max.) ▪ Beam Current: 100 mA (N + standard.) ▪ Uniformity: ±10% ▪ Irrad. Area: 40×40cm Commercial Ion Implanter Ion Beam Facilities for company [Mold & Die for Optical Lens] [Hair Clipper] [Juice extracting gears] [Cosmetic Bottle for UV Protection] Development for Company Ion Impanter for Automobile Interior Polymer (Co-research with Sinki Intermobile Co. ) Ion Implanter for Steel Plate Pre-treatment (Co-research with POSCO)

8. 8 Plenty Energy Clean Environment Healthy Life Prepared ion Possible ion Periodic Table Possible Ion for Beam Service

9. 9 Plenty Energy Clean Environment Healthy Life Status of Ion Beam Service for User Group  Ion Beam User – Growing trend of users Status of Ion Beam Service (June. 20, 2007 ~ Dec. 31, 2012) –Ion Implanter for Beam Service : Gaseous Ion Implanter, Metallic Ion Implanter, Dual Beam Ion Implanter –Total No. of Co-research institutions : 66 (Company(39), University(20), Institute(7)) –Total No. of Process : 3,271 (Company(2,059), University(981), Institute(231)) –Level of satisfaction : 92.1 ('12.12)  Annual No. of Process  Affiliation Distribution  Area Distribution

10. 10 Plenty Energy Clean Environment Healthy Life Status & Achievements (Industrial Application by Ion Beam Facility)

11. 11 Plenty Energy Clean Environment Healthy Life The lifetime of hair clipper blades is increased up to 3 times after nitrogen implantation. Development of the mass production process and equipment (production capability : 10,000ea/month) Technology transferred to Company. Export to Europe (France, Italy) - 50kV and 20mA ion source and 50kV acceleration tube - Uniform irradiation ( within 5% deviation) in the area of 300mm in dia. MFC and Power Supplies Ion source Accelerating tube Vacuum chamber Vacuum and Jig Control device Jigs (inside chamber) X-ray shield device [ hair clipper ] Lifetime Enhancement of Hair Clipper Blades [ Surface Hardness ]

12. 12 Plenty Energy Clean Environment Healthy Life [Mass production Facility] UV & Gas Protection Polymer UV protection & Oxygen Barrier of polymer by ion beam Technology transfer to Company. Development of the mass production process (100m/hour) The UV protection ratio of nitrogen ion implanted PC is above 95% in UV- A area Oxygen & H 2 O Barrier → prevent the deterioration of cosmetic [UV Protection films treated by ion beam] [ UV-Vis Transmittance by ion beam] [Sun-Cap] (UV protection & Oxygen barrier cosmetic case) [ Oxygen Transmittance]

13. 13 Plenty Energy Clean Environment Healthy Life [Vegetable Blender] [Gear of the Vegetable Blender] [Mass Production Jig] [Friction coefficient] Enhanced Wear Resistance of Vegetable Blender Gear Environmental friendly vegetable blender by ion beam Enhancement of wear-abilities of gear for grinding machine for vegetable juice Technology transfer to Company. Heavy metal ratio in vegetable juice decreased below WHO standard by ion beam Anti-corrosion & wear of metal gear → harmlessness to health Enhancement of juice-vegetable ratio Detecting amount [mg/L] WHO BeforeAfter Cr0.220.04<0.05 Ni0.480.09 - Formaldeh yde N.D. [The Heavy Metal Ratio in juice]

14. 14 Plenty Energy Clean Environment Healthy Life 14 [Vertical Ion Accelerator for Mass- Production of Black Diamond] Black diamond mass-production & development of several colored diamond Black diamond by nitrogen ion beam & heat treatment Commercialized by AZA Gems Co. Green & Orange diamond by proton beam (2MeV) No radiation problem after treatment & Good Color Uniformity [After Implantation & Heat Treatment (0.115 ct)] [Jig for Diamond] (100 carat/process) [Commercialization of Black Diamond(1,000 carat)] [Green & Orange diamond by proton beam ] Coloring of Diamond

15. 15 Plenty Energy Clean Environment Healthy Life [After Heat Treatment] Coloring of Gemstones Co + [After Metal Implantation] Fe + Cr + [Accessory Product using Colored Gemstones] Development of several colored Sapphire by metal ion beam & heat treatment Blue & Orange & Green Sapphire

16. 16 Plenty Energy Clean Environment Healthy Life Super-Hydrophilic Surface Modification by High flux Ion Beam The contact angle of Al surface was decreased from 80 to below 5 degree by High current nitrogen ion beam treatment(>100 ㎂ / ㎠ ) Hydrophilic performance was kept under 30 degree for durability test Surface morphology was changed to nano-fabric structure by ion beam. (bring the capillary phenomenon) Super-hydrophilic performance apply to cooling pin of heat exchanger in the air conditioner & refrigerator. This technology funded by Samsung Electronics Co. [Hydrophilic performance for durability test] [Wet / dry cycle test after ion beam + O 2 plasma treatment] [Nano fabric structure by high current ion beam]

17. 17 Plenty Energy Clean Environment Healthy Life Development of High Rate Etching Ion Source for Zn-Mg coated Steel Plate The cold rolled steel(CRS) was world-widely used in several industrial field, such as Automobile, Electric/Electronic Appliance, etc. - Request the higher performance coating layer, such as Zn-Mg or Al-Mg, due to the corrosion resistance. - Remove the oxide layer on CRS for the adhesion property of coating film in PVD process. To remove the oxide layer (about 10nm) on CRS using by dry etching process - Need high rate etching process up to 20nm/sec (Si wafer standard) - Design and manufacture the high current ion source and ion beam extraction system. Development of pretreatment Ion source for high rate etching process in alloy coating process on CRS (Process line speed : 100 ∼ 200m/min.) This technology funded by POSCO. Ion Source for Steel Plate Etching (Co-research with POSCO) [Beam Current Density Profile] Ar + Beam [Static Etching Rate of Si wafer ]

18. 18 Plenty Energy Clean Environment Healthy Life [Automobile Interior Polymer] [Pencil scratch test]  표면 코팅 없이 광택도 향상 및 표면 내스크래치성 3H 로 향상  내광성 신뢰성 검사 합격 (128J/m 2 ) Luminance & Anti-UV Enhanced Automobile Interior Polymer Luminance & anti-UV enhanced technology of polymers has been approved for its quality and is ready for commercialization Luminance of polymer improved by 2 times and anti-UV property enhanced up to 128MJ/m 2 for automobile interior component by using dual ion beam treatment Co-research with Company. Metal like skin on polymer by ion beam No delamination & color change under UV environment Ion Ion energy (keV) Ion dose (ions/cm 2 ) Pencil strength PC--HB-B N501E153H N+He701E153H-4H N+C951E154H [Luminance Change] [In-line type Mass-Production System] Ion Beam (O) Ion Beam (X) Ion Beam (X) Ion Beam (O) Metal like skinEnhanced the luminance

19. 19 Plenty Energy Clean Environment Healthy Life Ion Implanter Development -Achievements; Total No. of ion beam process for user group (6 years) : 3,271 (Company(2,059), University(981), Institute(231)) Development of 100mA, 50kV DuoPIGatron, 200mA, 20kV Bucket type ion source and metal ion source 300keV ion implanter development and installation at the Advanced Radiation Technology Institute Manufacturing and transferred several ion implanters to companies for Industrialization Summary (1)

20. 20 Plenty Energy Clean Environment Healthy Life Industrial Application by Ion Beam Facility -Achievements; -Lifetime Enhancement of Hair Clipper Blades -UV & Gas Protection Polymer -Enhanced Wear Resistance of Vegetable Blender Gear -Coloring of Gemstone -Super-Hydrophilic Surface Modification by High Flux Ion Beam -Development of High Rate Etching Ion Source for Zn-Mg coated Steel Plate -Luminance & Anti-UV Enhanced Automobile Interior Polymer -So, through verification on the industrialization feasibility by experiments, it is going to get it started, with cooperation of company, to enter into markets with developed technology and products. Summary (2)

21. 21 Plenty Energy Clean Environment Healthy Life Thank you