2. 1 Ken Gilleo PhD ET-Trends LLC 1 Introduction & Overview “What are the possibilities of small but movable machines?” - R. Feynman 1959 Feynman described MEMS and “Nano” “What are the possibilities of small but movable machines?” - R. Feynman 1959 Feynman described MEMS and “Nano”

3. 2 Sections 1.MEMS/MOEMS Introduction/overview 2.Nanotechnology Overview 3.MEMS Fabrication 4.MEMS Mechanisms & Operation 5.Introduction to Packaging 6.MEMS Special Packaging Requirements 7.Nano Packaging 8.MEMS Packaging 9.Commercial Packages for MEMS 10.Summary & Future

4. 3 Outline What’s MEMS? MEMS/MOEMS Fundamentals Features & Attributes Mechanics & Motion Applications

5. 4 MEMS M icro: small scale; similar to IC feature size* E lectro: electrical power & electronics M echanical: adds mechanical motion S ystem: integrated; can be a System-on-Chip Retains electronic features while adding mechanical structures Mechanical MOTION must be involved * Micro – not yet Nano -- NEMS

6. 5 MEMS; Electro vs. Electronic All MEMS must have “electro” feature Electro: power, control, sense and compute MEMS devices can have on-chip electronics Electronic circuitry for MEMS  Control, amplification, conditioning, etc. Electronics Locations 1. Integrated CMOS; iMEMS; 2. Wafer-level connected 3. Separate chips

7. 6 ADI Gyroscope Accelerometer

8. 7 The Center of Convergence MEMS Electronics Optics Mechanics OEOM Biotech Chemistry Physics Medicine MOEMS Nano- technology Telecom Where all Sciences & Technologies will Converge

9. 8 Convergence of electronics, mechanics, & (optics) Leverages semiconductor industry Mass-production in existing fabs Extreme “density”, highly scalability Extraordinary versatility and richness  sensors  energy devices  logic functions  motion  control  micro-manufacturing systems Key Attributes  Hear  Talk  Feel  Move  Walk  Grab  Think  See  Sense beyond  Control  Energize  Extract energy  Manufacture  Cut-pierce-etc.  More…

10. 9 Hear Talk Feel Move Fly Walk Grab Think Sense See Control Pump Synthesize Align Cut More MEMS Can:

11. 10 MEMS Structures

12. 11 Best MEMS Features Massively parallel manufacturing Can use Semi fabs; even older, smaller fabs Highly scalable; smaller = faster (less mass) Integrate everything; or bond wafers together Extraordinary functionality Ideal size for: optical, biological, chemical and human interaction

13. 12 MEMS Advantages Taps the “mega” semiconductors infrastructure Merges motion & electronics & energy Can combine MEMS + CMOS logic on one chip Multifunctional; separate or combinations  Sense; movement, energy, molecules, microbes  Compute; electronic logic, memory  Move; motion to solids, liquids, gases, and MEMS devices  Control; energy, signals, matter, motion  Produce; reagents, drugs, life forms

14. 13 Major Products Sensors (largest class; ~ 70%)  Motion detection; vehicles, machines, life forms  Position; gyroscopes, accelerometers  Force/pressure: gases, fluids, solids  Molecules; chemical, biological (emerging)  Energy; heat, light, mechanical Control  Energy; light, electrical, RF, sound, mechanical  Fluids; pumps for machines, biomedical, other  Gases; even MEMS rockets have been built  Reactions; for synthesis & analysis (incl. pharma)

15. 14 MEMS Motion (actuation) Deformable; cantilevers, beams - “no wear out” Sliding; linear Rotating; partial, full, multi-plane Rotating Inter-contact; gears, wheels Hinges Ejectors; fluids, gas, solids Combinations More on ACTUATION Later

16. 15 MEMS Sensors Motion Dongle Motion sensor - Moto 2-axis sensor - ADI Earthquake – warn, power, fuel shutoff Precise pedometers Security Air Bag sensor - ADI Game and computer input JPL Micro-gyro Military – US Gov’t. Vehicle; crash, roll- over, ride, mechanical wellness Robots; movement Military; vehicle, ordnance monitor MEMS enabled iPhone Motion- interactive

17. 16 MEMS Demo MEMS Demo Sandia National Laboratories presents… Sandia Sequel Can the Government solve the overload problem? BUG still wins! Video may not run unless file is downloaded

18. 17 Complex MEMS Demo Sandia National Laboratory Video may not run unless file is downloaded