1. ELEC-E3220 - Semiconductor Devices Spring 2016 Course overview Hele Savin Ville Vähänissi Alessandro Inglese Department of Micro and Nanosciences

2. Overview of the course Topics to be covered Schedule Course material Examination Mycourses website

3. Topics to be covered Summary of pn- and metal-semiconductor junction physics MOS MOSFET Semiconductor device fabrication (basics, background for Microfabrication course) Operation principle and latest application examples of –radiation sensors –mechanical sensors –solar cells –company seminar (Vaisala Oyj)

4. Lectures Time:Monday 13.15 - 16.00 and Wednesday 13.15 - 16.00 Place: Micronova building, large seminar hall Lecturers: Hele Savin, Micronova building 4 th floor (4158), hele.savin@aalto.fi Ville Vähänissi, Micronova building 4 th floor (4154), ville.vahanissi@aalto.fiville.vahanissi@aalto.fi Alessandro Inglese, Micronova building 4 th floor (4152), alessandro.inglese@aalto.fialessandro.inglese@aalto.fi Mikko Juntunen, Micronova building 4th floor (4150), mikko.juntunen@aalto.fimikko.juntunen@aalto.fi

5. Course material Chenming Calvin Hu "Modern Semiconductor Devices for Integrated Circuits", Pearson Education (2010) - chapters 3,4,5,6,7Modern Semiconductor Devices for Integrated Circuits https://www.eecs.berkeley.edu/~hu/Book-Chapters-and- Lecture-Slides-download.html Lecture slides, available at mycourses webpage Handouts on solar cells and mechanical sensorsHandouts

6. Choices for passing the course TWO possibilities 1.Take the exam (in February) + Solve the exercises (you get extra points) or 2. Take only the exam (in February and fall 2016)

7. Grading 1. Exam → grade from the exam (max 30 points) 2. Exercises (max 10 points) GradePoints 115-18 219-21 322-24 425-27 528-40

8. Exam The next exam is held on 17.2.2016 Typically the exam is held once during spring and once during autumn The exam consists of 6 exercises covering all the course topics

9. Exercises Numerical exercises that must be solved before each exercise session. The solution will be provided during the exercise sessions (see schedule). You will earn extra points by solving the exercises and returning the solution before the deadline! –Excellent training for the final exam…(participation highly recommended)

10. Schedule DateTime Content 4.1.13-16Course overview / Schottky and pn-junctions 11.1. 13-16 MOS capacitor 13.1.13-16MOSFET transistor + Exercise session #1 (2p - homework) 18.1.13-16MOSFET transistor 20.1.14-16 Oxidation + Lithography + Exercise session #2 (2p - homeork) 25.1.13-16Doping,Thin film deposition 27.1.13-16 Mechanical sensors + Exercise session #3 (1p – during lecture) 1.2.13-16 Radiant + Medical sensors + Exercise session #4 (1p – during lecture) 3.2.13-16Company presentation ( Vaisala Oyj) 8.2.13-16Solar cells 10.2.13-16Device fabrication + Exercise session #5 (1p) 15.2.13-16Summary exercises (3p – homework) 17.2.13-16Exam

11. My Courses https://mycourses.aalto.fi/course/view.php?id=5129 All material available there –Book chapters –Lecture slides –Videos –Assignments (exercises) –News –… Return your work/exercises to mycourses!