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Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Design of the multisite elongated neural microelectrode array showing the recording.

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Presentation on theme: "Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Design of the multisite elongated neural microelectrode array showing the recording."— Presentation transcript:

1 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Design of the multisite elongated neural microelectrode array showing the recording sites, interconnects, and bond pads. The figure is not to scale. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

2 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Illustration of neural probe deflections during the insertion phase (a) without deflection, (b) bending, and (c) buckling. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

3 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Geometric diagram of a single tapered probe electrode. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

4 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Behavior of the 2.5-mm [(a), (b)], 4.5-mm [(c), (d)], and 6.5-mm [(e), (f)] probes, without and with reinforcement, respectively, when they are subjected to axial horizontal force. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

5 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Schematic illustration of the standard MicraGem microfabrication process. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

6 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. SEM photos of the fabricated array using the standard MicraGem process: (a) probe array, (b) tip of the electrode, (c) reinforced electrode at the middle region, and (d) nonreinforced electrode. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

7 Date of download: 5/31/2016 Copyright © 2016 SPIE. All rights reserved. Buckling testing of probe electrodes when pressed against a hard plastic surface. Figure Legend: From: Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process J. Micro/Nanolith. MEMS MOEMS. 2009;8(3):033011-033011-8. doi:10.1117/1.3184795

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