1. LASER-BASED SOLID SAMPLE INTRODUCTION Performance with Convenience The ExiCheck Gas Exchange Accessory

2. Teledyne CETAC Technologies Headquarters in Omaha, Nebraska Specialize in Sample Introduction for Analytical Chemistry Laser R&D Facility in Bozeman, Montana

3. Teledyne, CETAC and Photon Machines

4. Excimer Lasers High Voltage Switching System Metal Electrodes Pre-Ionization System MirrorOutput Coupler

5. Passivation F 2 reacts with inner surfaces Over time, a layer of fluorine is present on the surfaces – Adsorption plays a role When the surfaces are full of fluorine, new fills see only fluorine and not metal or ceramic parts Surfaces are ‘Passive’ to fluorine reactions

6. Passivation Well passivated system is essential to peak operation – Affects Static and Dynamic Gas Lifetime If left alone, the passivation layer is lost over time – Re-passivation requires multiple fills and significant effort

7. Normal Operation Energetic F is formed, increasing fluorine reactions – F is lost from Excimer gas: need to replenish premix for optimum energy Electrodes burn-off with each shot – Metal vapor that coats internal surfaces and reacts with F in premix : needs to be flushed from the cavity regularly As F content decreases, energy required from electrodes increases; therefore electrode burn- off rate increases

8. Static Gas Lifetime Time in which a non-running laser has effective gas – Fluorine adsorbs and reacts to the internal surfaces Typically 1 – 2 weeks for a well passivated system – Shorter for less passivation as more ‘fresh’ surface available to the fluorine After 2 weeks, fluorine starts to depassivate – Reacted fluorine; therefore, unavailable to laser generation

9. Dynamic Gas Lifetime Defined as a number of shots Energy and Rep-Rate Dependent – Laser run at 9 mJ has roughly half the lifetime of one run at 5 mJ Linked to Static Gas Lifetime – Shorter static lifetime correlates to shorter dynamic lifetime More energy required at end of dynamic lifetime to produce the laser – Increased electrode burn-off

10. Gas Exchanges Replenish fluorine content in the cavity – Optimum lasing conditions Flush electrode burn-off – Prevents it coating the cavity and mirrors Important part of regular maintenance – Must be performed every 2 weeks for a well passivated system, even when the system is not is use

11. Missing a Gas Exchange Regular maintenance can be overlooked – Hectic Schedules – Field Trips – have to ensure maintenance backup Storage mode means repassivation will be required! Reliance on personnel not aware of the importance Dynamic Gas Lifetime is quickly degraded Repassivation requires a lot of gas exchanges – Low energy systems need longer periods of higher voltages to run

12. ExiCheck The Solution! An automated gas exchange device integrated into the laser system. No user interaction required!

13. Operation Modes Manual Gas Exchange – As requested Automated Gas Exchange at Scheduled Interval – Minimum interval 1 day If manual exchange performed, automated will run the next day – Maximum interval 14 days Progressive Gas Exchange – Long runs – Set through Chromium (Stability Mode = Energy w/PGE) Will not operate when Chromium is Running – prevents accidental activation during an overnight run.

14. Features and Benefits UNATTENDED Performs Gas Exchanges on a scheduled basis or manually – Maintains Passivation and Peak Performance of laser cavity – Reduced strain on HV components – Optimum Performance when you need it

15. Features and Benefits Fully integrated into Excimer Chassis – Clean – Safe: no human interaction with ArF cylinder Transparent to ATL Software and Chromium – No further user training required Easy Updates

16. A Customer Comment “The ExiCheck works well and we are very happy to have such an automated device. It supports us with the daily routine and we can concentrate on all the other challenges we have.”

17. Laser Ablation Range Nd:YAG Solid State Lasers ArF Excimer Lasers Turn-Key Femtosecond Lasers Stepped Heating Lasers

18. The ExiCheck Gas Exchange Accessory Performance with Convenience! CETACsales@Teledyne.com