1. 1 Aka Optical-MEMS Adding light to MEMS

2. 2 MOEMS M icro: small scale; similar to IC feature size O pto: optical (photonics) technology E lectro: electronics & electrical power M echanical: adds mechanical motion S ystem: integrated; can be a System-on-Chip MOEMS - viewed as a subset of MEMS Adds one more level of complexity Especially for packaging

3. 3 MEMS Electronics Optics Mechanics OEOM Biotech Analytical Chemistry Physics Medicine Adding light is a big multiplier MOEMS Imaging Photonics

4. 4 MOEMS Applications Digital projection; business, HDTV, cinema - major market Light & image tracking Adaptive mirrors, attenuators Adjustable lenses Sensing; thermomechanical Spectroscopy; analysis, increasingly important Photonic switching; especially Internet

5. 5 DISPLAY Technology ; TV, projectors, cinema Texas Instruments

6. 6 Optoelectronics Switching

7. 7 1,400,000 mirrors in one module Texas Instruments DLP TM MOEMSMOEMS MOEMSMOEMS Video Demos: 3 types of devices Video may not run unless file is downloaded

8. 8 MEMS/MOEMS Summary Incredibly versatile Powerful enabler! Will embrace all sciences & technologies Still embryonic in many areas Bio-med-MEMS has a very big future Timetable is hard to predict Growth is assured by diversity & enablement