1. A Declarative Feature-Based Cross Sectional Design Tool for Surface Micromachined MEMS i-Design 연구실 이희성

2. i-Design Lab Contents  Declarative/Procedural Knowledge  Micromachining Technology  Surface Micromachining  Micro Fabrication  Art-to-Part vs Part-to-Art  Feature-Based MEMS Design Tool  Process Generator Module  Generator Modules  User Defined Feature Generator Module  Design-by-Feature Module  Cellular Module  User Interface  Conclusion

3. i-Design Lab Declarative/Procedural Knowledge DECLARATIVE MEMORY PROCEDURE MEMORY WORKING MEMORY STORE RETRIEVEMATCH& EXECUTE LEARN ENCODEACT

4. i-Design Lab Micromachining Technology  Lithography 를 기반으로 화학적 / 물리적 식각 공정으로 미소기계 구조물을 제작  Bulk-Micromachining – 최소 수십 m  Surface-Micromachining  LIGA (Lithograpie, Galvanoformung, Abfomung) –X-ray 를 이용한 식각과 전기도금 및 사출공정 – 고 단면비 (aspect ratio) –X-ray 성형  전기도금  폴리머 사출

5. i-Design Lab Micromachining Technology Bulk-Micromachining Surface-Micromachining LIGA

6. i-Design Lab MEMS  Application Field –Automotive : accelerometer, pressure sensor… –Aerospace : air speed sensor, ejection seat control, altitude control… –Health Care : blood pressure sensor, surgical micro-gripper… –Manufacturing : tool vibration sensor, tool deflection sensor…  Design Methodology –Micro Level Mask  Geometry –Macro Level Geometry  Tool Path  Surface-Micromachining 기술에 Feature-Based Design 기법을 적 용

7. i-Design Lab Surface Micromachining  Sub-Process –Deposition Silicon Nitride, Oxide… –Etching Photolithographic Mask… –Doping Changing material property (electrical/thermal conductivity) Diffusion, Ion- implantation…  Controlled by Time

8. i-Design Lab Micro Fabrication  Intermediate process step –Macro : Any order –Micro : Fixed ( ∵ Time Consuming)  Art-to-Part –Traditional Design Paradigm –not easy, not visualized  Part-to-Art –Development of Geometric Design Tool –Development of Method to automate the Generation of Mask

9. i-Design Lab Art-to-Part vs Part-to-Art

10. i-Design Lab Feature-Based MEMS Design Tool 1. Process Generator Module 2. User Defined Feature Generator 3. Design Rule Generator Module 4. Fabrication Data Generator Module 5. Nominal Geometry Generator Module 6. Design-by-Feature Model 7. User Interface

11. i-Design Lab Process Generator Module  allows the designer to manage (upload, select, create, modify, delete) process information.  instantiating the process name, number of process steps, and information related to a specific instance of a process step (deposit, etch, doping)

12. i-Design Lab Generator Modules  Design Rule Generator Module –allows the designer to manage design rule information –The user may also create, modify, or delete design rules from the design rule database  Fabrication Data Generator Module –For Fabrication : CAM  Nominal Geometry Generator Module –For Analyzing : CAE

13. i-Design Lab User Defined Feature Generator Module  Use set of basic features classes  Basic Feature –bend features, protrusion features, dimple features, through hole features, blind hole features, and undercut features  Feature 의 구성 –Shape Description, Position and Orientation Description, Validity Description

14. i-Design Lab User Defined Feature Generator Module

15. i-Design Lab User Defined Feature Generator Module

16. i-Design Lab Design-by-Feature Module  Use features saved in feature database  LFDG –Node : Feature –Line : Dependency – 작업 순서에 신경 쓰지 않 고 설계 가능 – 피쳐 변경이 다른 피쳐에 영향을 주는지를 판단을 도움

17. i-Design Lab Feature Propagation and Mapping  Feature Propagation –Above the Design Layer  Feature Mapping –Below the Design Layer

18. i-Design Lab Design-by-Feature Module  MFDG –Relation between LFDGs of Different Layers

19. i-Design Lab Design-by-Feature Module  Changing Parameters  Entire Feature Model

20. i-Design Lab Cellular Model  Feature shapes + Basic Layer  Resultant Nature (additive/subtractive) depends on precedence of Feature

21. i-Design Lab User Interface  Efficiently and Intuitively Access

22. i-Design Lab Example

23. i-Design Lab Conclusion  전통적인 피쳐 디자인을 MEMS 분야에 적용  Declarative Feature-Based Design Tool 은 설 계된 모델의 제작가능성을 판단  설계자는 설 계에 집중  설계자는 직접 보면서 모델을 설계 가능  3D, Bulk-Micromachining, LIGA 에도 적용 가능