1. Giulio Pellegrini Actividades 3D G. Pellegrini, C. Fleta, D. Quirion, JP Balbuena, D. Bassignana

2. Giulio Pellegrini 2 Radiation-hard 3D detectors for the (s)LHC Inner pixel layer (IBL) replacement for ATLAS (2014) Fluence of 4.4 x 10 15 1MeV neq/cm 2 Super-LHC (2017) – Atlas and CMS 10 * luminosity upgrade on present LHC Fluence up to ~ 1 x 10 16 1MeV neq/cm 2 LHCb VELO upgrade Integrated fluence ~ 1 x 10 16 1MeV neq/cm 2 TOTEM experiment Integrated fluence ~ 1 x 10 16 1MeV neq/cm 2 Design fluences for ATLAS sensors (includes 2x safety factor) : Innermost Pixel Layer ~ 5cm radius :1.6 x 10 16 1MeV neq/cm 2 = 500 Mrad Outer Pixel Layers ~ 30cm radius: 3 x 10 15 1MeV neq/cm 2 = 150 Mrad

3. Giulio Pellegrini 3 3D Detectors Array of electrode columns passing through substrate Electrode spacing << wafer thickness (e.g. 10  m:300  m) Benefits: Low full depletion voltage Fast collection times → Reduced charge trapping Reduced charge sharing due to E-field shape → Higher signal in one pixel More complicated fabrication - micromachining Planar 300 µm µm First proposed by Parker et al. Nucl. Instr. Meth. A, 395 (1997) 328 Double sided 3D

4. Giulio Pellegrini 4 4 inch wafer CNM 3D-wafer Medipix2 ATLAS Strips Pads CNM Double-sided 3D fabrication runs ICP is a reliable and repeatable process (many test runs always successful). Yield: Strip detectors = 88%. ATLAS pixels = 50% Devices designed at Glasgow & CNM Fabricated at CNM Hole aspect ratio 25:1 10µm diameter, 250µm deep p-type and n-type substrates 285µm thick. Only one guard ring 10um wide

5. Giulio Pellegrini 5 Short strip detectors n + readout columns Irradiated at Karlsruhe with 26 MeV protons. Irradiations of strip 3D 1 x 10 16 1 MeV neq cm - 2 Charge multiplication? Word done with Glasgow Uni and Universität Freiburg. 1 x 10 16 1 MeV neq cm - 2 ALIBAVA Measurements also from testbeam available.

6. Giulio Pellegrini 6 Atlas pixels Atlas pixels, FE-I3 and new FE-I4 fabrication and irradiation for Insertable B-Layer and testbeam. In the framework of the Atlas 3D collaboration (http://test-3dsensor.web.cern.ch/test- 3dsensor/). Common layout in the Atlas 3D collaboration (CNM,FBK,SINTEF, Stanford). New FE-I4 design (2x2 cm 2 ). A module should be fabricated with 3D detectors. CNM already fabricated 24 6” wafers to test the bump bonding at IZM and 8 4” wafers to test the bump bonding at SELEX. Dummies include one structure to test pixel detectors with ALIBAVA read out electronics. Work done with IFAE and Glasgow Uni.

7. Giulio Pellegrini 7 CMS pixels Work done with PSI, access to GICSERV. We are designing a new mask with single chips and one module 8x2. We are also implementing a new bias grid for 3D detectors without punch trough

8. Giulio Pellegrini 8 TOTEM strips Work done with CERN, access to GICSERV. We are designing a new mask to fabricate TOTEM strip detectors with 3D detectors. Strip pitch 66um AC coupled. 3cm long n+ readout

9. Giulio Pellegrini 9 LHCb pixels Pion beam Individual pion tracks telescopeDUT Secondary 120 GeV pion beam from SPS 4 Timepix, 2 Medipix planes in telescope DUT: double sided 3D N-type sensor from CNM/Glasgow Expected track extrapolation error: < 3 μm 7 ADC30 ADC 7 ADC shared Measurements at 0º. No true with tilting Preliminary results with scan to 10º. 6 medipix2 3d irradiated with neutrons and waiting for bump bonding

10. Giulio Pellegrini 10 Synchrotron Applications B16 Test beamline at the Diamond Monochromatic X-ray beam of 14.5keV Beam size FWHM were measured as 4.5±0.3 µm in x 6.7±0.3 µm in y THL~25% THL~50% THL~75% Reduced level of over counting and under counting in 3D 7%4%3D P –Type 7%3%3D N –Type 7%0%Planar Corners*CentreInefficiencies Work done with Diamond light source and Glasgow Uni. New medipix3 detectors already fabricated and bonded at CNM

11. Giulio Pellegrini 11 Stripixels 3D strip detectors with 2D positioning on one side. Double metal process. Mask already designed, detectors are being fabricated at CNM. Work done with Brookhaven National Laboratory.

12. Giulio Pellegrini 12 Resume of the projects Strip 3D was financed by SCTESP3 and Rd50. Atlas pixels is part of the NEWATLASPIX CYCYT project LHCb project is a GICSERV access from Universidad de Santiago CMS project is a GICSERV access from PSI TOTEM project is a GICSERV access from CERN Synchrotron project is a GICSERV access from Diamond light source. Stripixels project is a GICSERV access from University of Laaperanta (and BNL).