1. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Main processes for surface micromachining of an InP-based FP cavity structure: (a) Initial heterostructure layers grown by MOCVD, (b) plasma dry-etching process, and (c) released structure. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

2. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. SEM image of InP-based cantilever beams. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

3. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. SEM images of InP-based membrane structures: (a) Type A with square membrane of side 100μm, (b) type B with circle membrane of diameter 80μm, and (c) type C with square membrane of side 40μm. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

4. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Experimental setup of white-light vertical scanning interferometer. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

5. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Schematic diagram of a FP filter model and its detailed view. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

6. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. SEM image of a square membrane indicating undercuts. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

7. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Deflection of cantilevers of length 200, 250, and 300μm. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

8. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. 3-D plot of InP membrane structures. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

9. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Deflection of membrane types A, B, and C across (a) section a–b and (b) section c–d. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

10. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Comparison of experimental and simulation results for deflection across sections a–b and c–d of membrane types A, B, and C. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

11. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Deformation contours of FP cavity structures of different configurations. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968

12. Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Deflections of FP cavity structures across section P-Q. Figure Legend: From: Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP J. Micro/Nanolith. MEMS MOEMS. 2010;9(2):023010-023010-8. doi:10.1117/1.3421968