1. MHI#19 号機の１回目の EP2  Process log  Condition of EP2 & Rinsing process  Status of working  Monitor data during EP & Rinsing process Period : 2012/2/17~ 2/27 Process : CP @flanges, EP2(20μm) under low current density, Improved 1 st Water Rinsing, Brushing @HOM & Flange using FM-20, Degreasing(FM-20, 2%) [5min], Brushing @Flange, HPR x 2 [7 hours], Assembly in C.R., Vacuum evacuation, Leak check, Baking @140 ℃ (~48hours) Preparation : Washing vacuum components with ultrasonic, Cleaning in C.R. Workers : M. Sawabe, Kirk, T. Shishido (KEK), K. Nakamura, F. Tsukada, T. Kitajima (Assist Engineering Co.), T. Okada (K-VAC), M. Asano, T. Yanagimachi (Nihon Advanced Technology) Kirk STF Cavity Group Meeting @2012/2/27 1

2. EP acid (2/24 のサンプルを使用 ) Nb ingredient : 10.2g/ℓ HF ingredient : ? g/ℓ ( 全体 ?g/ℓ の 65% が反応に使われる ) Al ingredient : <?mg/ℓ Current density : ～ 33mA/cm 2 ( 温度を低く抑えるため ) Cavity surface temperature : <35 ℃ ( 上流側 BP のみ霧吹き水冷 ) Control Voltage : 温度と電流密度を見ながら制御 With normal N 2 gas flow during extracting EP acid (8ℓ/min) 1 st water rinsing (1.5hours) Improved version (25ℓ/min で 20 分間上下から流し続ける ) 1 分毎に 1 秒間水抜きを繰り返す (40 分間 ) 最後の 30 分は 10min (storing)/3min (flushing) で行う Degreasing (5 min) FM-20(2%) HPR ( ～ 7 hours) 3h32m (4 turns, w/o blind flanges) 3h32m (4 turns, w/ blind flanges) Condition of EP2 & Rinsing Brushing @HOM & Flange using FM-20 Brushing @HOM & Flange using FM-20 2

3. Process log ① STF Cavity Group Meeting @2012/2/27 2/1717:00MHI#19 is carried in EP area Check every flange Polishing every flange by scotch bright 2/20 9:15Check every flange 10:00CP @every flange 10:45Check every flange [O.K.] / Attachment of jigs for EP HPR operation starts without cavity 11:20Set cavity to EP bed with crane 11:25Meeting for tomorrow’s working procedure Installation of cathode bar to cavity [O.K.] Set data logger to cavity (totally 12ch) Leak check with N 2 gas [O.K.] Preparation for EP is completed 14:00fin. 3

4. STF Cavity Group Meeting @2012/2/27 2/21 9:31Cavity rotation starts / EP acid flow starts 9:58EP2 starts / Area monitor around EP area 11:16EP2 stops [1h18m] / Idling rotation (3 rpm / 20min) / Plastic case detachment 11:37Idling rotation stops 11:38EP acid is removed from cavity with N 2 gas flow(0.020MPa) 11:50First rinsing with ultra pure water starts 13:20First rinsing with ultra pure water stops [1h30m] 13:30Detachment of restriction jigs / Data logger detached 13:40Un-installation of cathode bar from cavity / washing cathode bar (sulfur exists) Vacuum parts rinsing with ultrasonic in C.R. transferring cavity from EP bed to wagon Detachment of jigs for EP / Detaching every blind teflon flange (No mark) 14:20Brushing at every flange and HOM couplers using FM-20 / Shower rinsing Attachment of flanges for degreasing 14:45Flowing FM-20 into cavity 14:47Degreasing with ultrasonic starts 14:52Degreasing with ultrasonic stops [5min] 14:54Removing FM-20 from cavity Detachment of flanges for degreasing 15:00Brushing at every flange using FM-20 / Shower rinsing Process log ② 4

5. STF Cavity Group Meeting @2012/2/27 2/2115:35Transferring cavity from wagon on turntable for HPR using crane 15:38Checking tolerance between position of nozzle and center of beam pipe 15:451 st HPR for inside cavity starts 19:131 st HPR for inside cavity stops [3h32m] (4 turns) 19:20Attaching every blank flange in C.R. 19:48fin. 2/22 9:08HPR outside cavity with blind flanges starts [45mins] 9:562 nd HPR for inside cavity with blind flanges starts 13:282 nd HPR for inside cavity with blind flanges stops [3h32m] (4 turns) 13:30Cavity enters into C.R. 13:55Assembly in C.R. (Class 10) starts 14:50Assembly in C.R. (Class 10) finishes / Moving out from Class10 to Class1000 14:56Vacuum evacuation starts with heat gun warming 15:02Turbo pump ON @~200Pa Turbo pump status 100% Metal gauge ON @5.0x10 -2 Pa 15:30Leak check thoroughly @~1.0x10 -3 Pa (Perfect!) [O.K.] 15:50Baking @140 ℃ starts (Max Vacuum Level just after baking start : ~2.17 x 10 -3 Pa) 16:18Cavity vacuum : 1.81 x 10 -3 Pa @49.4 ℃ /99.9 ℃ /109.3 ℃ /63.4 ℃ (Top/Cell#3/Cell#7/Bottom) 18:37Cavity vacuum : 4.13 x 10 -4 Pa @136 ℃ /140 ℃ /140 ℃ /125 ℃ (Top/Cell#3/Cell#7/Bottom) Process log ③ 5

6. Process log ④ STF Cavity Group Meeting @2012/2/27 2/2412:00Cavity vacuum : 2.86 x 10 -5 Pa @ 140 ℃ /140 ℃ /140 ℃ /140 ℃ (Top/Cell#3/Cell#7/Bottom) 16:54Cavity vacuum : 2.78 x 10 -5 Pa @ 140 ℃ /140 ℃ /140 ℃ /140 ℃ (Top/Cell#3/Cell#7/Bottom) 17:10Baking Off Ion Pump ON 17:50Cavity vacuum : 5.68 x 10 -7 Pa @ 79 ℃ /103 ℃ /75 ℃ /68 ℃ (Top/Cell#3/Cell#7/Bottom) 2/2523:00Cavity vacuum : 5.29 x 10 -8 Pa @ 20 ℃ 2/2617:00Cavity vacuum : 4.75 x 10 -8 Pa @ 20 ℃ 2/27 9:00Cavity vacuum : 4.61 x 10 -8 Pa (0.0 x 10 -8 Pa @I.P.) 9:25MHI#18 moves to V.T. stand ベーキング後の空洞真空の下がり具合は前回同様低い。 やはりベーキング温度が高いことが効いているようである。 6

7. STF Cavity Group Meeting @2012/2/27 Status of 1 st EP2 for MHI#19 ① current voltage T cavity T reservoir T room T cavity average current density 平均電流密度が 35mA/cm 2 程度になる ように電圧を調整する。 (low current density EP) 7

8. STF Cavity Group Meeting @2012/2/27 Status of 1 st EP2 for MHI#19 ② 左図は平均電流密度と電圧の相関 右図は定常状態での分布 target 8

9. 最近の定常状態の比較 ※ MHI#12, 13, 16 号機の２回目の EP2 は 5μm しか行っていない。 Cavity Mean temp. [ ℃ ]R.M.S. temp. [ ℃ ] Mean i [mA/cm 2 ]R.M.S. i [mA/cm 2 ] MHI-A 1 st 26.10.836.51.5 MHI#12 1 st 25.60.934.51.4 MHI#13 1 st 26.90.937.41.5 MHI#12 2 nd 26.20.536.31.4 MHI#13 2 nd 26.60.737.61.6 MHI#14 1 st 26.90.537.31.6 MHI#15 1 st 27.90.936.21.5 MHI#14 2 nd 29.00.838.01.2 MHI#15 2 nd 28.10.737.30.9 MHI#16 1 st 27.41.037.41.0 MHI#16 2 nd 29.20.236.00.7 MHI#17 1 st 31.20.536.90.9 MHI#14 3 rd 31.10.536.80.7 MHI#15 3 rd 26.30.736.21.7 MHI#16 3 rd 28.90.936.61.5 TOS#2 1 st 28.50.833.11.6 MHI#18 1 st 27.51.034.01.4 MHI#19 1 st 28.00.732.81.2 9

10. 空洞内と外部温度との比較 STF Cavity Group Meeting @2012/2/27 Cavity 空洞内 上流 BP Cell#1Cell#2Cell#3Cell#4Cell#5Cell#6Cell#7Cell#8Cell#9 下流 BP 環境 MHI-A 1 st 26.1 MHI#12 1 st 25.6 MHI#13 1 st 26.9 MHI#12 2 nd 26.2 MHI#13 2 nd 26.6 MHI#14 1 st 26.935.727.134.327.832.425.525.024.823.627.132.39.6 MHI#15 1 st 27.935.428.833.431.332.829.029.226.627.228.730.010.9 MHI#14 2 nd 29.036.129.934.931.631.928.630.126.829.129.735.810.6 MHI#15 2 nd 28.133.729.128.528.033.030.030.828.830.730.238.29.5 MHI#16 1 st 27.434.326.427.327.431.829.227.728.229.424.635.310.8 MHI#16 2 nd 29.234.029.031.429.130.628.125.431.129.728.728.911.3 MHI#17 1 st 31.231.030.630.331.530.928.630.829.330.532.232.812.2 MHI#14 3 rd 31.135.530.434.730.431.1 28.931.429.632.136.914.0 MHI#15 3 rd 26.338.429.130.629.428.924.326.629.727.922.325.810.9 MHI#16 3 rd 28.940.031.234.233.535.327.431.631.532.131.828.510.8 TOS#2 1 st 28.540.432.532.429.931.027.327.031.128.3 30.710.9 MHI#18 1 st 27.532.330.832.730.230.725.928.228.827.028.728.611.2 MHI#19 1 st 28.035.830.229.031.335.828.627.029.230.333.528.410.6 ※今回も前回同様、上流側ビームパイプに保冷材及び霧吹きを行ったため、温度が低く抑えられた。 10

11. Status of 1 st EP2 for MHI#19 ③ STF Cavity Group Meeting @2012/2/27 #1#2#3#4#5 #6#7#8#9#10 EP2 の間の空洞表面温度の状況。 #11 #12 Steady state: 35.8 30.2 29.0 31.3 35.8 28.6 27.0 29.2 30.3 33.5 28.4 10.6 28.0 ℃ 11

12. STF Cavity Group Meeting @2012/2/27 Status of 1 st EP2 for MHI#19 ④ #1#2#3#4#5 #6#7#8#9#10 EP2 の間の空洞表面温度の状況（前ページの最後の拡大図）。 #11 #12 12

13. STF Cavity Group Meeting @2012/2/27 #1#2#3#4#5 #6#7#8#9#10#11 #12 Status of UWR for MHI#19 ① Steady state: 13.6 12.3 13.7 11.7 15.4 11.7 11.9 13.5 12.0 12.7 13.1 17.3 13

14. STF Cavity Group Meeting @2012/2/27 一次洗浄中の空洞温度の状況（前ページの拡大図） #1#2#3#4#5 #6#7#8#9#10#11 #12 Status of UWR for MHI#19 ② 14

15. Status of UWR for MHI#19 ③ STF Cavity Group Meeting @2012/2/27 15

16. STF Cavity Group Meeting @2012/2/27 Status of HPR for MHI#19 ノズルは 1st HPR では４往復、 2nd HPR でも４往復させた。 16