1. Current gas flow scheme Gas handlerTPC 1~2 m Braided plastic tube 1~2 m Alum. tube 5 m Alum. tube Pressure relief valve P10 Rotary Pump (Edwards E2M8) Data metrics 1404 valve controller Needle valve Air Flow Meter Flow Meter Regulator w/ Micrometer 0.5 L /s Down to (at least) 0.03 L /s Gate valve Vent at the wall Vent at the wall

2. New gas flow scheme P10 Gas handlerTPC Vent at the wall Vent at the wall 1~2 m SS tube 1~2 m Alum. tube 5 m Alum. tube Pressure relief valve Rotary Pump (Edwards E2M8) Data metrics 1404 valve controller Needle valve H H < 5% Dry N Flow Meter Flow Meter Regulator w/ Micrometer e.g. 0.03 L /s 0.5 L /s e.g. 0.6 L /s Gate valve Flow Meter Flow Meter Ar SS tube

3. New gas handler Ar Gas handler Regulator input H Regulator Gate valve Other Excess flow control valve Flash arrester Air input Flow Meter Flow Meter Rotary Pump (Edwards E2M8) Vent Needle valve w/Micrometer KF16 /25 16 16/25 16 25 Flow Meter Flow Meter Dry N Regulator ¼” Matheson 6295-C (4L/min) Matheson 6103A-F 16 SS-tube 1 m SS-tube 3~4 m SS-tube 5 m ¼” Adopter ¼”