1. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com SensorsSoftwareService Dr. rer. nat. Klaus Veit 10 years

2. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com company deflectometry CTA mirror inspection other products: WLI, fringe projection agenda

3. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com company advanced optical 3D-sensors since 2001 – spin-off from Chair for Optics, University of Erlangen cooperation with Chair for Optics

4. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com products white light interferometerKORAD 3D fringe projection sensorsFaceSCAN 3D deflectometry SpecGAGE 3D

5. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com deflectometry intrinsic data: local slope

6. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com phase measuring deflectometry (PMD) principle ground glass surface under test projector camera

7. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com deflectometry advantages direct measurement of local slope: information efficient, simple, low noise 1 Mio points measured in 10 sec scaleable from mm to meter

8. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com deflectometry SpecGAGE 3D field 80 mm accuracy 0.5µm local sensitivity ~ 20 nm measuring time 10 sec

9. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com eye glass measurement A A B B local refractive power

10. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com eye glass measurement: tool traces

11. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 11 deflectometry for car windows curvature map

12. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 12 CTA mirrors 1.2 m flat-to-flat focal length 16 m Images: courtesy of the CEA Saclay, France. Institute of Optics, Information and Photonics – University of Erlangen

13. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 13 CTA mirrors height, slope and curvature maps from one single measurement Institute of Optics, Information and Photonics – University of Erlangen compact setup for climate chamber

14. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 14 CTA mirrors Institute of Optics, Information and Photonics – University of Erlangen shape z(x,y)local curvature

15. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 15 CTA Mirror: shape deviation 20 µ

16. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 16 Deflectometry – CTA Mirrors Results

17. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 17 Deflectometry – CTA Mirrors Results calculated from deflectometric data direct PSF from 2f setup

18. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com 18 white-light-interferometry (WLI) measuring principle

19. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com white-light-interferometry (WLI) advantages measurement uncertainty ~ 1µm: independent from aperture, distance, material coaxial optics: measurement in deep boreholes possible all types of surfaces (smooth, rough, volume scatterers, …) up to 4 Mio data points Field up to 110 mm

20. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com white-light-interferometry (WLI) KORAD 3D -L area: 55x55 mm² lat. Res.: up to 30 µm camera: up to 3 MPix uncertainty: ~ 1µm speed: up to 500µm/sec

21. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com WLI – applications injection nozzle offline system – production line FoV 3 x 3 mm² Ø = 3mm, depth = 45mm measuring of cone angles high precision (  = 0.02°)

22. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com WLI – applications bumps and solder paste (electronics) inline system – 24/7 FoV 13 x 13 mm² dimensions of bumps (coplanarity) warpage high-speed (1 sec)

23. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com WLI – applications sealing surfaces inline system FoV 15 x 15 mm² flatness <1 µm measuring time: 5 sec.

24. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com WLI – applications rotary valve semi-automatic system Close to the production line FoV 50 x 50 mm² flatness 5 µm step height 15-20 µm

25. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com fringe projection for medical applications FaceSCAN 3D / BodySCAN 3D

26. www.3d-shape.com 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com

27. 3D-Shape GmbH Mail: info@3d-shape.com Albert-Rupp-Straße 2 Tel: +49 (0) 9131 / 977 959 - 0 91052 Erlangen Fax: +49 (0) 9131 / 977 959 - 11 www.3d-shape.com contact information www.3d-shape.com Dr. Klaus Veit +49 (0) 9131 / 977 959 - 16 +49 (0) 9131 / 977 959 - 11 www.3d-shape.com veit@3d-shape.com General Manager: Mr. Benno Knapp