1. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 The ablation chamber with components used during machining Figure Legend:

2. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 Carousel stage with sample holders and possible machining operation trajectories (created using comsol Multiphysics 4.3b) Figure Legend:

3. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 Carousel operation indication sample trajectories: (a) rastering motion in the x–y plane and (b) a CAD model of the sample part indicating the beam trajectory and sample trajectory Figure Legend:

4. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 Laser beam induced spiral contour illustration showing: (a) contours formed during rastering motion in the x–y plane and (b) sinusoidal motion of the carousel in the space and time domain Figure Legend:

5. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 The preliminary thermopaper trials used to determine the optimum controller inputs with beam spot at the center (black square = target dimensions) Figure Legend:

6. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 The thermopaper trials for Trials 5–6 at varied beam spot position (black square = target dimensions) Figure Legend:

7. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 Comparison the raster period (T) with the predicted values at varied raster speeds ω = 1–3 deg/s and raster angles with the range of ε = 11 ± 0.46–16 ± 0.21 deg Figure Legend:

8. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 The Si 3 N 4 slab spiral profiles: (a) stereo microscope images of the fully machined target and (b) the excessive center SEM micrographs at 100 μm Figure Legend:

9. Date of download: 6/28/2016 Copyright © ASME. All rights reserved. From: Optimization of Spiral Contours for Pulsed Laser Micromachining J. Micro Nano-Manuf. 2015;3(3):031002-031002-6. doi:10.1115/1.4030765 Surface topography plots for the fully machined Si 3 N 4 slabs at ±400 mJ, ε = 11 deg, and ω = 1 deg/s at varied surface treatment time: (a) mean roughness and removal depth plots and (b) the quadrant method used for roughness measurements by the Surftest SJ- 201P profiler Figure Legend: