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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. Schematic view of the layered structure of the fabricated cantilever device. Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. Resonant frequency simulation with variations of (a) mass volume, (b) beam thickness, and (c) the mechanical strain simulation along the length of the beam. Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. SEM images of the mass volume of the fabricated cantilever devices: (a) with mass volume of 0.32 mm3 and (b) with mass volume of 0.52 mm3. Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. Magnitude and phase angle as functions of frequency for (a) cantilever with mass volume of 0.32 mm3 and (b) cantilever with mass volume of 0.52 mm3. Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. Peak voltage and average power as functions of resistance for (a) cantilever with mass volume of 0.32 mm3 and (b) cantilever with mass volume of 0.52 mm3. Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. Average power as a function of the acceleration of gravity, g(m/s2), for cantilevers with mass volumes of (a) 0.32 mm3 and (b) 0.52 mm3. Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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Date of download: 7/1/2016 Copyright © 2016 SPIE. All rights reserved. Current as function of the acceleration of gravity, g(m/s2). Figure Legend: From: Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester J. Micro/Nanolith. MEMS MOEMS. 2012;11(3):033009-1-033009-7. doi:10.1117/1.JMM.11.3.033009
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