1. IBWS 2006, VLAŠIM1 OPTICON OPTICAL REPLICATION EXPERIMENTS REVIEW Veronika Semencová, Libor Švéda, Adolf Inneman, René Hudec, Ladislav Pína, Michaela Skulinová Reflex s.r.o., Prague, Czech Republic

2. IBWS 2006, VLAŠIM2 SPECTROSCOPY 1 star - apperture + optical fiber + spectrometer more stars - star by star (slow) - more appertures + optical fibers + several spectrometers - faster?

3. IBWS 2006, VLAŠIM3 SLICING THE FOCAL IMAGE

4. IBWS 2006, VLAŠIM4 SLICING OUTPUT y x Data cube

5. IBWS 2006, VLAŠIM5 HOW TO SLICE?

6. IBWS 2006, VLAŠIM6 GOALS  electroplating process with minimized stress  repe a ted replication from one mandrel  double replication (mandrel – mother – daughter) simple mandrel image slicer  quality tests of replicas

7. IBWS 2006, VLAŠIM7 REPLICATION TECHNOLOGY mandrel metrology separation layer electroforming separation (mandrel–mother) metrology (mandrel–mother) separation layer electroforming separation (mother-daughter) metrology data processing, evaluation of the results mandrel metrology separation layer electroforming separation (mandrel–mother) metrology (mandrel–mother) separation layer electroforming separation (mother-daughter) metrology data processing, evaluation of the results

8. IBWS 2006, VLAŠIM8 INTERNAL STRESS  minimalizing the internal stress  length difference is proportional to internal stresses Bath 3 Bath 1 Bath 2 Bath 4 (galvanic bath chemistry optimization)

9. IBWS 2006, VLAŠIM9 DOUBLE REPLICATION a) GNIRS b) MIRI no.004 c) LFM 7 PUPIL MIRROR

10. IBWS 2006, VLAŠIM10 DOUBLE REPLICATION daughter mother mandrel daughter mother mandrel MIRI no.004 GNIRI daughter mother mandrel

11. IBWS 2006, VLAŠIM11 mandrel daughter GNIRS SLICER Taylor-Hobson profilometer measurements at Reflex R = 145.8 mmR = 150.5 mm radius comparison mandrel – daughter hor

12. IBWS 2006, VLAŠIM12 radius of curvature (R) horver Taylor-Hobson profilometer measurements at Reflex GNIRS SLICER

13. IBWS 2006, VLAŠIM13 deviation mandrel - daughter GNIRS SLICER

14. IBWS 2006, VLAŠIM14 5 th step MIRI no.004 deviation mandrel – daughter 9 th step

15. IBWS 2006, VLAŠIM15 MIRI no.004 deviations mandrel – daughter (from 2 to 12 step)

16. IBWS 2006, VLAŠIM16 MIRI no.004 radius comparison mandrel–mother-daughter (from 2 to 13 step) radius comparison mandrel–mother-daughter (from 2 to 13 step)

17. IBWS 2006, VLAŠIM17 mandrel daughter

18. IBWS 2006, VLAŠIM18 mandrel daughter

19. IBWS 2006, VLAŠIM19 CONCLUSIONS  double replica from GNIRS, MIRI no.004 and LFM 7 PUPIL MIRROR slicer realized  deviation between mother and daughter is smaller than deviation between mandrel and mother near /4 for 1 µm  surface shape accuracy near /4 for 1 µm  internal stresses in electroplated layers and their dependence on electrolyte composition for shape control

20. IBWS 2006, VLAŠIM20 END THANK YOU END THANK YOU

21. IBWS 2006, VLAŠIM21

22. IBWS 2006, VLAŠIM22 Shape difference mandrel – replica (>> internal stresses study is necessary) Shape difference mandrel – replica (>> internal stresses study is necessary) LFM challenger No.2 (Th01a) LFM challenger No.7 (Th02a) LFM challenger No.5 (Th05a)