1. How small is nanotechnology? lessons outline Integrated Circuits and 45nm linewidths (2007 ETP – lesson day 1) What are MEMS? (lesson day 2) Common uses of MEMS around us –Accelerometers –iPhone –Wii –BioMEMS Cross-disciplinary nature of nanotech. –What should I study in college to pursue a career in nanotechnology? Future of MEMS

2. MicroElectroMechanical Systems (MEMS)

3. Types of MEMS devices 1.Sensor - converts a nonelectrical input quantity (i..e. pressure, temperature, acceleration) into an electrical output quantity. Sensors are commonly encountered. 2.Actuator - converts electrical input quantities into non-electrical output quantities. 3.Smart MEMS - MEMS combined with additional electronic circuitry for control and processing information

4. MEMS applications Accelerometer –Can detect acceleration or tilt –used in car airbags –Tilt detection in iPhone –Used in Wii-mote to detect motion One type of accelerometer works conceptually like the air bubble in a construction level. The square in the middle of the chip is a resistor that heats up a gas bubble. The next larger squares contain thermal couples that sense the location of the heated bubble as the device is tilted or accelerated.

5. Use in car airbags Another type of accelerometer employs the concept of inertia to determine amount of deceleration in the car “seismic mass” is deflected due to deceleration and changes in capacitance between comb electrodes activate the airbags Note the size!!

6. Airbag deployment videos https://onlineservice1.progressiveagent.com/interact-cgi/rc/vown/rc_crash_videos.asp

7. iPhone tilt sensor Accelerometer in iPhone detects orientation of phone and adjusts the screen accordingly. Games are also possible that use the feature. http://www.youtube.com/watch?v=dYeHyxuhfEI

8. Wii remote Motion is detected by Wii remote and translates into commands for the game http://www.youtube.com/watch?v=V1BUQGaHn_Q http://www.youtube.com/watch?v=V1BUQGaHn_Q Alternate uses are being developed http://www.youtube.com/watch?v=VWN9TvweZc8 http://www.youtube.com/watch?v=VWN9TvweZc8

9. Sensors of the future Magnetometer –scientific instrument used to measure the strength and/or direction of the magnetic field in the vicinity of the instrument http://www.youtube.co m/watch?v=kqeRaU8 ufZchttp://www.youtube.co m/watch?v=kqeRaU8 ufZc

10. MEMS applications Actuator –Used to control the mirrors in DLP television (Digital Light Processing) –Watch a video http://www.dlp.com/includes /demo_flash.aspx http://www.dlp.com/includes /demo_flash.aspx

11. MEMS applications Optical Switch –Mirrors tilted to direct optical data

12. Optical switching mirrors A hinged piece sheet of silicon is driven back and forth. A laser is focused at an angle such that as the mirror is elevated, the light is reflected into the camera The switching speed (time required to deflect optical energy) can range from 2.67 milliseconds for fullly raising and lowering the mirror to 1.18 milliseconds for smaller angle deflections. Courtesy Sandia National Laboratories, SUMMiT™ Technologies, mems.sandia.gov

13. Gear Trains Courtesy Sandia National Laboratories, SUMMiT™ Technologies, mems.sandia.gov Probes connecting power

14. BioMEMS BioMEMS is the application of MEMS technology in the field of biomedical and the living sciences. It is expected to revolutionize the way medicine is practiced and delivered. Every needle is designed to penetrate the skin within a depth of less than 100 micrometer avoiding most pain receptors in the skin Micro-needles also reduce the dead volume usually found in regular needles (from microliters to nanoliters) and thus can save significant amounts of precious drug compounds micro-needles combine strength, sturdiness, low flow resistance, biocompatibility and disposability EXAMPLE: Micro-needles

15. Tiny internal cameras Called the “endoscope pill” Takes images of the inside of your intestines http://www.youtub e.com/watch?v=Y v8TAaKGDF8&fea ture=relatedhttp://www.youtub e.com/watch?v=Y v8TAaKGDF8&fea ture=related

16. What do I study to get into MEMS? Since MEMS is very cross-disciplinary, study in the following fields could lead to MEMS-related careers –Chemistry –Biology –Physics –Engineering

17. Here is an example of some of the course offerings at UC-Irvine http://mae.eng.uci.edu/

18. Future applications As scientists and engineers begin to learn more detailed characteristics of manufacturing and operation, who knows what the next applications will be? Courtesy Sandia National Laboratories, SUMMiT™ Technologies, mems.sandia.gov