1. 1 Challenge the future A Study on Micro-Actuators for Atomic Force Microscopes Chonghe Zhong

2. 2 Challenge the future Atomic Force Microscope (AFM) http://www.youtube.com/watch?v=ZfotHVtylq0 AFM image examples

3. 3 Challenge the future Nanite Project objective Actuator

4. 4 Challenge the future Tasks Characterization Design & Simulation The z actuator used in the new Nanite Generation The actuator used in Nanite A and Nanite B Dynamic property along its z axis Generated Lorentz force Voltage-Deflection Dynamic Property Heat conduction Feasibility of developing a piezoelectric actuator (on the basis of the Ceramic Bimorph Bender )

5. 5 Challenge the future z The actuator used in Nanite A and Nanite B Platform Cantilever Chip Spring Hinges Magnet Coil

6. 6 Challenge the future Device: Laser Doppler Vibrometer (LDV) Working principle of LDV Characterization Dynamic property along its z axis Real Device

7. 7 Challenge the future Laser beam Resonance Freq. ≈ 205Hz Characterization Dynamic property along its z axis

8. 8 Challenge the future z Problem: the mass of the moving body

9. 9 Challenge the future Flexprint Magnet Pairs Coil Actuator used in the new Nanite Generation x y z

10. 10 Challenge the future Z-Actuator A A A-A

11. 11 Challenge the future F Lorentz = 35.3  59.7mN Model CompositionForce Distribution Characterization Generated Lorentz force

12. 12 Challenge the future Characterization Deflection vs. voltage slope≈142um/A 25 20 15 10 5 0 0 20 40 60 100 120 140 Deflection (um) 80 Current (mA) 160

13. 13 Challenge the future Resonance Freq.≈1150Hz Laser beam Characterization Dynamic Properties

14. 14 Challenge the future Characterization heat conduction Small bonding pad Big bonding pad Current Input=150mA

15. 15 Challenge the future Tasks Characterization Design & Simulation The z actuator used in the new Nanite Generation The actuator used in Nanite A and Nanite B Dynamic property along its z axis Generated Lorentz force Voltage-Deflection Dynamic Property Heat conduction Feasibility of developing a piezoelectric actuator (on the basis of the Ceramic Bimorph Bender )

16. 16 Challenge the future Design & Simulation Ceramic Bimorph Bender 21mmX7.5mmX1.25mm

17. 17 Challenge the future Half actuator Symmetric actuator Design & Simulation Concepts

18. 18 Challenge the future Design & Simulation Concepts Real structure MEMS structure Low voltage input Smaller dimension Miniaturization

19. 19 Challenge the future half actuator with 4-layer design symmetric actuator with 3-layer design Design & Simulation Concepts

20. 20 Challenge the future Design & Simulation Concepts Concept Comparison Platform deformation of the symmetric structure Problems for the symmetric actuator Deflection Deflections are almost the same

21. 21 Challenge the future Design & Simulation Concepts Concept Comparison Deflection Dynamics 1-layer symmetric actuator 10 1 10 2 10 3 10 1 10 2 10 3 10 -4 10 -3 10 -2 10 -4 10 -3 10 -2 1-layer half actuator

22. 22 Challenge the future 2-layer half actuator2-layer symmetric actuator 10 -2 10 -3 10 -4 10 1 10 2 10 3 10 1 10 2 10 3 10 -4 10 -3 10 -2.1 10 -2

23. 23 Challenge the future 3-layer half actuator 3-layer symmetric actuator 10 1 10 2 10 3 10 1 10 2 10 3 10 -5 10 -4 10 -3 10 -2 10 -4 10 -3 10 -1

24. 24 Challenge the future Design & Simulation Concepts Concept Comparison Deflection Dynamics Mass Volume Cost Assembly difficulty Half actuator Influencing Parameters

25. 25 Challenge the future Design & Simulation Concepts Concept Comparisons Half actuators Influencing Parameters Voltage 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Deflection (mm) Voltage (V) 0.0 0.1 0 20 406080100120140 160180 200

26. 26 Challenge the future Individual Bender Length Design & Simulation Concepts Concept Comparisons Half actuators Influencing Parameters Voltage 0 7 8 9 10 1213 20 21 11 15161718 19 14 Individual bender length (mm) 5 10 35 40 45 30 25 20 15 Deflection (um)

27. 27 Challenge the future 1-layer half actuator 2-layer half actuator 3-layer half actuator Design & Simulation Concepts Concept Comparison Half actuator Influencing parameters build-up

28. 28 Challenge the future Design & Simulation Concepts Concept Comparison Half actuator Influencing parameters build-up Test Deflection 140 120 40 20 0 80 100 60 0 5 10 15 25 30 3540 20 Deflection (um) Voltage (V)

29. 29 Challenge the future Design & Simulation Concept Comparison Half actuator Influencing parameters build-up Test Deflection Dynamic Property

30. 30 Challenge the future -150 1-layer 2-layer 3-layer 10 2 10 3 Frequency (Hz) -140 -160 -150 10 2 10 1 -120 -160 -150 -130 -140 -125 -135 10 1 -165 -145 -155 Magnitude (dB) -130 -120 Magnitude (dB) 10 1 -170 -175 Magnitude (dB)

31. 31 Challenge the future Conclusion 1. The concept by using ceramic bimorph bender is a potential concept to develop in the future, especially the ‘’half actuator’’. With compares, symmetric actuators are not really recommended. 2. Although the resonance frequencies of the build up actuators are low (200-300Hz), as the miniaturization is needed in further development, the stiffness and mass will change in correspondence and result in a higher response frequency. 3. According to the measurements, the real actuators perform almost the same as The simulation results. Therefore, the simulations can be used as a good evidence for further development.