1. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Experimental spectra with a reactor pressure of 10 Torr at (a) room temperature and (b) plasma temperature. The plasma generator power was 500 W and the feed gas was entirely composed of H 2. Figure Legend:

2. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Theoretical fits to experimental data by use of CARSFT code set to a mole fraction equal to one for data at (a) room temperature and (b) plasma temperature. Fitting of the spectra with the CARSFT code resulted in a temperature of 277 and 1133 K for the room temperature and plasma spectra, respectively. Figure Legend:

3. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Experimental R ex and theoretical R th ratios at 10 Torr. Experimental ratios, shown by the solid symbols, were produced by heating the susceptor stage of the MPCVD reactor. Theoretical ratios, shown by the empty symbols, were produced by use of the CARSFT code. The dashed line connecting the dots illustrates the results from the spline interpolation. Measurements were taken approximately 3 mm above the puck surface. Figure Legend:

4. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Percent relative error of the measurements from the verification procedure with temperature Figure Legend:

5. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Experimental and theoretical ratios converted to mole fractions Figure Legend:

6. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Theoretical spectrum generated by the CARSFT code for a thermal system at 1000 K. Transitions from the cold band are labeled Q 01 (J). For clarity, only the odd J transitions are labeled. Figure Legend:

7. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Theoretical spectrum generated by the CARSFT code for a thermal system at 2000 K. Transitions from the cold band are labeled Q 01 (J) and transitions from the hot band are labeled Q 12 (J). For clarity, only the odd J transitions are labeled. Figure Legend:

8. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Horizontal temperature profile from the center of the plasma at approximately 3 mm above the molybdenum puck surface. Triangles correspond to measurements with a plasma. Circles correspond to measurements without a plasma at room temperature. Figure Legend:

9. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Square-root of the intensity of the H 2 Q 01 (1) line as a function of beam intensity. The Stokes beam energy was 4.8 mJ/pulse. Figure Legend:

10. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Square-root of the intensity of the H 2 Q 01 (1) line as a function of reactor pressure Figure Legend:

11. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Experimental mole fraction of H 2 (50 sccm) in microwave plasma at various temperatures with CH 4 (10 sccm) and N 2 (20 sccm) for a reactor pressure of 10 Torr and a generator power of 300 and 500 W. Dashed lines indicate the theoretical mixture mole fractions for the corresponding mixture. Figure Legend:

12. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 Experimental mole fraction of H 2 (50 sccm) in microwave plasma at various temperatures with CH 4 (10 sccm) and N 2 (20 sccm) for a reactor pressure of 30 Torr and generator power of 500 and 700 W. Dashed lines indicate the theoretical mixture mole fractions for the corresponding mixture. Figure Legend:

13. Date of download: 7/5/2016 Copyright © ASME. All rights reserved. H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy J. Micro Nano-Manuf. 2015;4(1):011005-011005-9. doi:10.1115/1.4031916 CARS signal near spectral region of vibrational hot band Figure Legend: