1. KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering Lecture V Thermal Processes

2. ` KUKUM – SHRDC INSEP Training Program 2006 Thermal Processes in IC Fabrication School of Microelectronic Engineering

3. KUKUM – SHRDC INSEP Training Program 2006 Thermal Processes: Definition School of Microelectronic Engineering

4. KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

5. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Introduction School of Microelectronic Engineering

6. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Introduction School of Microelectronic Engineering

7. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application School of Microelectronic Engineering

8. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Diffusion Barrier School of Microelectronic Engineering

9. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Passivation Surface School of Microelectronic Engineering

10. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Screen Oxide School of Microelectronic Engineering

11. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Pad & Barrier Oxides in STI Process School of Microelectronic Engineering

12. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Pad Oxide School of Microelectronic Engineering

13. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Device Isolation School of Microelectronic Engineering

14. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Blanket Field Oxide Isolation School of Microelectronic Engineering

15. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – LOCOS School of Microelectronic Engineering

16. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – LOCOS Process School of Microelectronic Engineering

17. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Sacrificial Oxide School of Microelectronic Engineering

18. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Device Dielectric School of Microelectronic Engineering

19. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Device Dielectric School of Microelectronic Engineering

20. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Mechanisms School of Microelectronic Engineering

21. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Mechanisms School of Microelectronic Engineering

22. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Oxide Growth Rate Regime School of Microelectronic Engineering

23. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Silicon Dry Oxidation School of Microelectronic Engineering

24. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Wet (Steam) Oxidation School of Microelectronic Engineering

25. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Silicon Wet Oxidation Rate School of Microelectronic Engineering

26. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate School of Microelectronic Engineering

27. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Temperature School of Microelectronic Engineering

28. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Wafer Orientation School of Microelectronic Engineering

29. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Wet Oxidation School of Microelectronic Engineering

30. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Dopant Concentration School of Microelectronic Engineering

31. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Differential Oxidation School of Microelectronic Engineering

32. KUKUM – SHRDC INSEP Training Program 2006 Oxidation Process School of Microelectronic Engineering

33. KUKUM – SHRDC INSEP Training Program 2006 Dry Oxidation System School of Microelectronic Engineering

34. KUKUM – SHRDC INSEP Training Program 2006 Dry Oxidation School of Microelectronic Engineering

35. KUKUM – SHRDC INSEP Training Program 2006 Gate Oxidation Steps I School of Microelectronic Engineering

36. KUKUM – SHRDC INSEP Training Program 2006 Gate Oxidation Steps II School of Microelectronic Engineering

37. KUKUM – SHRDC INSEP Training Program 2006 Wet Oxidation Process School of Microelectronic Engineering

38. KUKUM – SHRDC INSEP Training Program 2006 Wet Oxidation Process Steps I School of Microelectronic Engineering

39. KUKUM – SHRDC INSEP Training Program 2006 Wet Oxidation Process Steps II School of Microelectronic Engineering

40. KUKUM – SHRDC INSEP Training Program 2006 Rapid Thermal Oxidation School of Microelectronic Engineering

41. KUKUM – SHRDC INSEP Training Program 2006 Oxide Measurement School of Microelectronic Engineering

42. KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Summary School of Microelectronic Engineering

43. KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

44. KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Introduction School of Microelectronic Engineering

45. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping: Illustration School of Microelectronic Engineering

46. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping: Illustration School of Microelectronic Engineering

47. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping: Illustration School of Microelectronic Engineering

48. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process I School of Microelectronic Engineering

49. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process II School of Microelectronic Engineering

50. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process II School of Microelectronic Engineering

51. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps I School of Microelectronic Engineering

52. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps II School of Microelectronic Engineering

53. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps III School of Microelectronic Engineering

54. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps IV School of Microelectronic Engineering

55. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps V School of Microelectronic Engineering

56. KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps VI School of Microelectronic Engineering

57. KUKUM – SHRDC INSEP Training Program 2006 Dopant Oxide Deposition School of Microelectronic Engineering

58. KUKUM – SHRDC INSEP Training Program 2006 Cap Oxidation School of Microelectronic Engineering

59. KUKUM – SHRDC INSEP Training Program 2006 Drive-In School of Microelectronic Engineering

60. KUKUM – SHRDC INSEP Training Program 2006 Drive-In School of Microelectronic Engineering

61. KUKUM – SHRDC INSEP Training Program 2006 Strip Oxide School of Microelectronic Engineering

62. KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Limitations & Applications School of Microelectronic Engineering

63. KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Drive In School of Microelectronic Engineering

64. KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Well Implantation & Drive In School of Microelectronic Engineering

65. KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering

66. KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering

67. KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

68. KUKUM – SHRDC INSEP Training Program 2006 Post- Implantation Annealing I School of Microelectronic Engineering

69. KUKUM – SHRDC INSEP Training Program 2006 Post- Implantation Annealing II School of Microelectronic Engineering

70. KUKUM – SHRDC INSEP Training Program 2006 Before Ion Implantation School of Microelectronic Engineering

71. KUKUM – SHRDC INSEP Training Program 2006 After Ion Implantation School of Microelectronic Engineering

72. KUKUM – SHRDC INSEP Training Program 2006 After Ion Implantation School of Microelectronic Engineering

73. KUKUM – SHRDC INSEP Training Program 2006 Thermal Annealing I School of Microelectronic Engineering

74. KUKUM – SHRDC INSEP Training Program 2006 Thermal Annealing II School of Microelectronic Engineering

75. KUKUM – SHRDC INSEP Training Program 2006 Thermal Annealing II School of Microelectronic Engineering

76. KUKUM – SHRDC INSEP Training Program 2006 Annealing: Summary I School of Microelectronic Engineering

77. KUKUM – SHRDC INSEP Training Program 2006 Annealing: Summary II School of Microelectronic Engineering

78. KUKUM – SHRDC INSEP Training Program 2006 Annealing: Summary III School of Microelectronic Engineering

79. KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

80. KUKUM – SHRDC INSEP Training Program 2006 Rapid Thermal Processes: Introduction School of Microelectronic Engineering

81. KUKUM – SHRDC INSEP Training Program 2006 Rapid Thermal Processes: Introduction School of Microelectronic Engineering

82. KUKUM – SHRDC INSEP Training Program 2006 RTP Chamber School of Microelectronic Engineering

83. KUKUM – SHRDC INSEP Training Program 2006 Annealing & Dopant Diffusion I School of Microelectronic Engineering

84. KUKUM – SHRDC INSEP Training Program 2006 Annealing & Dopant Diffusion II School of Microelectronic Engineering

85. KUKUM – SHRDC INSEP Training Program 2006 Anneal Rate vs. Diffusion Rate School of Microelectronic Engineering

86. KUKUM – SHRDC INSEP Training Program 2006 Dopant Diffusion After Anneal School of Microelectronic Engineering

87. KUKUM – SHRDC INSEP Training Program 2006 Advantages of RTP over Furnace School of Microelectronic Engineering

88. KUKUM – SHRDC INSEP Training Program 2006 RTP: Summary

89. KUKUM – SHRDC INSEP Training Program 2006 Thermal Processes: Summary School of Microelectronic Engineering