1. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Actuator concept. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

2. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Graphical illustration of a mathematical model of an actuator and part of the faceplate. Here xa is the displacement of the actuator rod, xm the displacement of the mirror at the location of the actuator, Fvc the voice coil force, Fa the force exerted on the mirror, ma the mass of the actuator rod, mm a lumped mass of a representative part of the mirror, ka the stiffness of the suction cup, km the stiffness of the lumped-mirror-mass connection to the rest of the mirror, ca the viscous damping coefficient of the suction cup, and cm the viscous damping coefficient of the connection between the lumped mirror mass and the rest of the mirror. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

3. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Bode plot of transfer function from the voice coil force Fvc to the force acting on the faceplate, Fa. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

4. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Solid curve: transfer function from voice coil force, Fvc, to actuator displacement. Dashed curve: closed-loop transfer function from actuator rod displacement command, xr, to actuator rod displacement, xa. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

5. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Principle of observer-based controller for the actuator. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

6. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Upper curve: time series showing a typical force command signal over time. Lower curve: time series of heat dissipation in actuator. Here L0=25m, ve=15m∕s, λ=2.2μm, r0=1m, ωn=2π×660s−1, ζ=0.1, and km=1.72×105N∕m. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

7. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Actuator prototype. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

8. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Laboratory test stand with actuator and mirror simulator. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014

9. Date of download: 7/7/2016 Copyright © 2016 SPIE. All rights reserved. Block diagram of prototype electronics. Figure Legend: From: Novel concept for large deformable mirrors Opt. Eng. 2006;45(7):073001-073001-13. doi:10.1117/1.2227014