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Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the barometric pressure sensor. Figure Legend: From: Complementary.

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Presentation on theme: "Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the barometric pressure sensor. Figure Legend: From: Complementary."— Presentation transcript:

1 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the barometric pressure sensor. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

2 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Two-dimensional simplification of the squared membrane. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

3 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Simulation result of the barometric pressure sensor. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

4 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. The relationship between the maximum displacement of the movable electrode and the loaded pressure. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

5 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Design 1: The relationship between the capacitance and the loaded pressure. The initial gap of the capacitor is 1.8 μm. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

6 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Design 2: The relationship between the capacitance and the loaded pressure. The initial gap of the capacitor is 0.5 μm. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

7 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. The fabrication process of the barometric pressure sensor. (a)–(f) Standard CMOS process, (g)–(i) post-MEMS process. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

8 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. One capacitive pressure sensor. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

9 Date of download: 7/8/2016 Copyright © 2016 SPIE. All rights reserved. Typical measured pressure response for a capacitive pressure with side length of 500 μm at 21.7°C. Figure Legend: From: Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor J. Micro/Nanolith. MEMS MOEMS. 2011;10(1):013018-013018-5. doi:10.1117/1.3555125

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