1. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Optical proximity correction. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

2. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Examples of edge types. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

3. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Overview of the proposed method. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

4. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Layout features: (a) CSS and (b) CCAS. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

5. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Concept of the proposed HBM. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

6. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Comparison between CCAS and CSS on different parameter rin (l=1.0 μm). Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

7. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Comparison between CCAS and CSS on different parameter l (rin=150 nm). Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

8. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Sampling results of hidden variables. R^ values of σf, σr(normal), σr(convex), σr(concave), and σr(line-end) are 1.09, 1.01, 0.99, 0.98, and 1.00, respectively. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

9. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. Performance comparison on different training sample number. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

10. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. EPE distributions. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

11. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. OPC results on a one-dimensional layout: the red line is model-based OPC, while the blue line is HBM-based OPC. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009

12. Date of download: 7/10/2016 Copyright © 2016 SPIE. All rights reserved. OPC results on two-dimensional layouts: the red line is model-based OPC, while the blue line is HBM-based OPC. (a) pattern 1, (b) pattern 2, (c) pattern 3, and (d) pattern 4. Figure Legend: From: Optical proximity correction with hierarchical Bayes model J. Micro/Nanolith. MEMS MOEMS. 2016;15(2):021009. doi:10.1117/1.JMM.15.2.021009