1. Precision Manufacturing & Inspection of Optical Components 光學元件精密製造與檢測 --- Ch 11.1~11.2 Precision Manufacturing & Inspection of Optical Components 光學元件精密製造與檢測 --- Ch 11.1~11.2 Speaker: Bo-Wen Xiao ( 蕭博文 ) Advisor: Prof. Yi-Pai Huang ( 黃乙白教授 ) Prof. Chung-Hao Tien( 田仲豪教授 ) Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan Jan. 17 2008

2. 2 Advanced Display Optics Lab Outline  Form accuracy - Non-contact measurement - Contact measurement  Surface roughness - Related nouns - Parameter definition - Measuring method - Express method  Conclusions

3. 3 Advanced Display Optics Lab Form Accuracy Inspected Items:Definition: Straightness Flatness Roundness Cylindricity Profile of a Line Profile of a Surface Non-Contact Measurement Measurement Contact Measurement Non-Contact Measurement Measurement Contact Measurement p: peak v: valley

4. 4 Advanced Display Optics Lab Non-Contact Measurement White-Light interferometric profilometer Test wavefront (sample) Reference wavefront (reference plane) Surface profile (surface structure, roughness) + Testing of reflective material & transmissive material

5. 5 Advanced Display Optics Lab Contact Measurement Laser interferometric probe profilometer ( laser interferometer + probe profilometer ) interference of coherent laser Δz

6. 6 Advanced Display Optics Lab Outline  Form accuracy - Non-contact measurement - Contact measurement  Surface roughness - Related nouns - Parameter definition - Measuring method - Express method  Conclusions

7. 7 Advanced Display Optics Lab Surface Roughness roughness: machining method waviness: material strain tool abrasion machining condition material defect circumstance form: deformation

8. 8 Advanced Display Optics Lab Related Nouns traverse length evaluation length sampling length - Length - Profile curve - Cutoff value 0.08,0.25,0.8,2.5,8,25

9. 9 Advanced Display Optics Lab Related Nouns (ii) - Mean line - Least square mean line - Center line

10. 10 Advanced Display Optics Lab Parameter Definition - (Center line average roughness) International Organization for Standardization (ISO) ISO-4287:1984

11. 11 Advanced Display Optics Lab Parameter Definition (ii) - (Ten point height roughness) - (Maximum height roughness)

12. 12 Advanced Display Optics Lab Measuring Method - Comparison method - Cross-section Measuring method - scanning probe measurement - light interference measurement

13. 13 Advanced Display Optics Lab Express Method - indication (1) machining indication (2) surface roughness (3) machining method (4) referencelength (5) direction of tool marks (6) allowance Chinese National Standards (CNS)

14. 14 Advanced Display Optics Lab Express method (ii) - machining indication

15. 15 Advanced Display Optics Lab Express method (iii) - surface roughness - machining method

16. 16 Advanced Display Optics Lab Express method (iv) - direction of tool marks - allowance

17. 17 Advanced Display Optics Lab Outline  Form accuracy - Non-contact measurement - Contact measurement  Surface roughness - Related nouns - Parameter definition - Measuring method - Express method  Conclusions

18. 18 Advanced Display Optics Lab Conclusions  Form Accuracy - White-Light interferometric profilometer - Laser interferometric profilometer  Surface Roughness - Parameter definition (Ra,Rmax,Rz) - Express method ( indication symbol for surface)

19. 19 Advanced Display Optics Lab Thanks for your kind attention !!

20. 20 Advanced Display Optics Lab