1. UT-MARLOWE CEC Inha University Chi-Ok Hwang

2. UT-MARLOWE Extensively modified version of MARLOWE Version 12 Scattering tables in Version 3.1 Native FORTRAN into C++ in Version 4.0 Kinetic Accumulative Damage Model (KADM) and modified Kinchin-Pease (KP) model in Version 4.0 Extending the validity to lower energies (<= 1 keV)

3. UT-MARLOWE

4. Multi-body collision algorithm - using a modified interatomic pair-potentials simulating the effect of three-body potentials; for collisions with large impact parameter

5. Kinetic Accumulative Damage Model (KADM) Two phases: defect production (1 ps) and defect diffusion and interaction (0.1 ms or longer determined by the dose rate and the implanter scanning pattern) Defect diffusion by a (kinetic) Monte Carlo defect hopping algorithm 10 % critical defect density for Si amorphization

6. TOMCAT TOpography based Monte CArlo Transport (TOMCAT) in 1-D and arbitrary 2-D and 3-D structures Using the physically-based models of UT-MARLOWE 5.0 cf) standard approach to 2-D/3-D simulation making use of 1-D profiles - giving a lateral Gaussian tail - using point response profiles (simulations of implants into very small windows) as Green’s functions to the large- window implant problem, superposing the point responses over the entire topography

7. TOMCAT Using the detailed effects of transport through varying topography and materials, as well as damage build-up in the crystalline regions TOMCAT = TOMCAT + Sherwood (2-D graphical visualization tool) + UTVIEW (3-D graphical visualization tool) Octree decomposition scheme Three-dimensional trajectory replication one more aggressive than the lateral trajectory replication scheme