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Strip detector with surrounding guardring Dimension Details 6750um (active edge boundaries) 6500um active width (130strips x 50um) Entrance window for.

Published byVictoria Hamilton Modified over 8 years ago

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Presentation on theme: "Strip detector with surrounding guardring Dimension Details 6750um (active edge boundaries) 6500um active width (130strips x 50um) Entrance window for."— Presentation transcript:

1 strip detector with surrounding guardring Dimension Details 6750um (active edge boundaries) 6500um active width (130strips x 50um) Entrance window for x-rays 2415um

2 Pad layout for strip detector w/surrounding Guard Ring Backside contact: opening 196um x 46um, both left and right bottom corner Pad opening: 32umx192um Guard ring Pad opening 32umx192um

3 Cross section of GR device Active device on support substrate 2415um Active device Support substrate 75um (plasma diced) 300um (wafer-saw) 2415um 50um-100um?

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