1. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of multilayer metamaterial device (T1 series) for transmission enhancement. (a) The view of the front metal layer. (b) The view of the middle metal layer. (c) The view of the back metal layer. (d) A unit cell in the multilayer metamaterial device (T1 series). (e) The parallel transmission spectra (txx or tyy) of different structure groups calculated by the commercial CST Microwave Studio. When hw is equal to hl, then the cross-apertures will come to be square. Figure Legend: From: The effect on cross-polarization conversion by the end shape of electric split-ring resonators in a multilayer metamaterial device Opt. Eng. 2016;55(3):037110. doi:10.1117/1.OE.55.3.037110

2. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of multilayer metamaterial device for polarization conversion (T2 series). (a) The view of the front metal layer. (b) The view of the middle metal layer. (c) The view of the back metal layer. (d) A unit cell in the multilayer metamaterial device (T2 series). (e) The simulated transmission spectra of different devices. hs=80 μm, Wtip=W/2. Figure Legend: From: The effect on cross-polarization conversion by the end shape of electric split-ring resonators in a multilayer metamaterial device Opt. Eng. 2016;55(3):037110. doi:10.1117/1.OE.55.3.037110

3. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of multilayer metamaterial device for polarization conversion (T3 series). (a) The view of the front metal layer. (b) The view of the back metal layer. (c) The semitransparent view from the front side. (d) A unit cell in the multilayer metamaterial device (T3 series). (e) The simulated transmission spectra of different devices. Letip=Wetip=W/2. Figure Legend: From: The effect on cross-polarization conversion by the end shape of electric split-ring resonators in a multilayer metamaterial device Opt. Eng. 2016;55(3):037110. doi:10.1117/1.OE.55.3.037110

4. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Surface current distributions at 0.459 THz for the metal layers of the T3 series when L1=L2=220 μm, W=20 μm. Here, E-phase means the phase of the incident wave for the E-field. Figure Legend: From: The effect on cross-polarization conversion by the end shape of electric split-ring resonators in a multilayer metamaterial device Opt. Eng. 2016;55(3):037110. doi:10.1117/1.OE.55.3.037110

5. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Comparison of the PCRs of different devices. Figure Legend: From: The effect on cross-polarization conversion by the end shape of electric split-ring resonators in a multilayer metamaterial device Opt. Eng. 2016;55(3):037110. doi:10.1117/1.OE.55.3.037110

6. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. The simulated modulating performance of T4, which has silicon active tips, as shown in (a) and (b) in pink. (a) and (b) are the schematics of the front and back metal layers, respectively. The parameters of the devices are same as T3 shown in Fig. 4. Figure Legend: From: The effect on cross-polarization conversion by the end shape of electric split-ring resonators in a multilayer metamaterial device Opt. Eng. 2016;55(3):037110. doi:10.1117/1.OE.55.3.037110