1. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. The system layout for the diffractive optics calibrator (DOC). Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

2. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Binary, linear grating profile: t is the etching depth; S is the grating period; b/S is the duty cycle; and A0 and A1 are the amplitude of the output wavefront from the unetched and etched areas of the grating, respectively. ϕ is the phase step between the two areas. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

3. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Monte Carlo simulation on uncertainty of duty cycle and corresponding RMS phase error of the first diffraction order. (Given ±1% uniform-distributed errors in intensity measurements.) Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

4. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Monte Carlo simulation on uncertainty of etching depth and corresponding RMS phase error of the first diffraction order. (Given ±1% uniform-distributed errors in intensity measurements.) Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

5. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. DOC’s schematic layout. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

6. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. DOC hardware with LabVIEW user interface. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

7. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. DOC’s graphical user interface in LabVIEW. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

8. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Block diagram of the DOC measurement procedures. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

9. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. The layout of a set of gratings with varying duty cycle from 40% to 52%. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

10. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Repeatability of measured duty-cycle as a function of light level. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

11. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Repeatability of measured etching depth as a function of light level. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

12. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Duty cycle measured values comparison between Veeco and DOC. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101

13. Date of download: 9/18/2016 Copyright © 2016 SPIE. All rights reserved. Etching depth measured values comparison between Veeco and DOC. Figure Legend: From: Diffractive optics calibrator: design and construction Opt. Eng. 2013;52(12):124101-124101. doi:10.1117/1.OE.52.12.124101