1. A New MSE Evaluation Method
New Technology
A New MSE Evaluation Method

2. This technology can visualize
strength
of materials at
nano-level.
Even for samples
which can not be evaluated so far…
The World's First Method

3. Demands from fields of advanced technology
Layered
thin film
Semiconductor
LC・LED
Demands from fields of
Advanced Technologies
Cut・Grind
organic
thin film
Fuel Cell・Solar cell
Demands from fields of advanced　technology

4. If you need to know the surface
strength of materials and thin films...
If you need to know the surface
Indentation Test
Peeling Test
Bending Test
Tribology Test
　I can not evaluate the strength
But…
　of nano-size smaples…

5. However,
with the new
MSE Method

6. Important
Erosion by nano-size particle will evaluate the strength of materials
Measurement of eroded surface
Erosion Wear
Strength can be evaluated
by repeating this procedure.

7. Erosion by nano-size particle This method will wear
AVE. 1.2μm
nano-size
Alumina particle
Nozzle
This method will wear
the surface at nano-level
High speed collision of
slurry(particles and water)
by nano-size particle

8. Erosion Profiling zoom Result Precise control by a small nozzle
Evaluation of material strength
with nano-particle erosion

9. Progress of wear
Profile Superposition

10. ＤＬＣ Test result Visualized graph of measurement result I can see
the slope!
Plotting
the depth
Strength of base material
Strength of coating
ＤＬＣ
Test result
Thickness of coating

11. How to use the ＭＳＥ?
MSEは卓上装置

12. The ＭＳＥ tester
Usage method

13. Parts of the tester
Control
panel
Collision box
Slurry pot table

14. Setting slurry pot Mix MSE nano-particle with water in the slurry pot.
Set the slurry pot on the pot table.
Mix MSE nano-particle with water in the slurry pot.

15. Set a sample on the sample arm.
Setting a sample
Adjust the height.
Set a sample on the sample arm.
Sample
Sample
table
試験片を台にセットして

16. ＭＳＥ erosion treatment Automatic controlled collision
Nozzle
装置で処理
Automatic controlled collision
under the set condition.

17. Profiling measurement
Profilometer
Profile

18. Repeat measurements Specify the wear depth! Wear Depth (μm)
Profile Superposition

19. Wear curve Base Coating Interface Wear Depth （µm）
Collided particle amount　（g）

20. Wear rate curve Interface Base Coating Wear Rate （µm/g）
Wear Depth　（µm）

21. What can be measured?

22. the strength of thin film itself.
①This can measure
the strength of thin film itself.
ＤＬＣ
Wear Graph
Film thickness
420nm
Film thickness
380nm
Film thickness
300nm

23. This can measure the strength from
the surface to deeper areas continuously.
Chemical
coating
Wear graph
Base
Chemical coating
Surface coating

24. This can measure the strength from
the surface to deeper areas continuously.
500
400
300
200
100
600
700
Lens of
glasses
Base
Hard coating
Ground
Optical functional coating

25. This can measure the film thickness based on strength.
TiN(2.8µm)
TiC(0.6µm)
W　C
For example, TiN multi-layers like this・・・

26. This can measure the film thickness based on strength.
Wear graph
W　C
TiC(0.6µm)
TiN(2.8µm)
You can see
the coating
point of strength
You can know
the film
thickness!
TiN
W　C
TiC

27. This can measure the film thickness based on strength
You can know
the distribution
of strength in
depth direction
With the
distribution
graph of
wear rate
Wear distribution
TiN
（Coating）
TiC
（Coating）
W　C
（Base）
TiN
W　C
TiC

28. the strength of interface
This can measure
the strength of interface
Wear rate contribution

29. Comparison with the mass content This can measure
the strength of interface
Wear rate contribution
Correlation between
the strength
distribution
and mass content Co 1 2 3 4 5 20 40 60 80
100
Wear Depth (μm)
Mass content 　% Ti N W C O
Elemental analysis result
Comparison with
the mass content

30. Contribution to
manufacturing

31. Evaluation of sliding surface
Contribution to development
of coating technologies and
quality control on abrasion surface
Evaluation of sliding surface
Contribution to manufacturing 　－ＭＳＥ－

32. Evaluation of cutting tools
Contribution to development
of coating technologies and
quality control on abrasion surfaces
Evaluation of cutting tools
Contribution to manufacturing 　－ＭＳＥ－

33. Evaluation of ＤＬＣ coating
Technical development and
quality control of super hard coating
Evaluation of ＤＬＣ coating
Contribution to manufacturing 　－ＭＳＥ－

34. Evaluation of ＣＶＤ Diamond
Technical development and
quality control of super hard coating
Evaluation of ＣＶＤ Diamond
Contribution to manufacturing 　－ＭＳＥ－

35. Evaluation of LC oriented coating Technical development and
quality control of super thin film coating
Evaluation of
LC oriented coating
Contribution to manufacturing 　－ＭＳＥ－

36. Evaluation of automotive parts
Technical development and
quality control of gradient coatings
Evaluation of automotive parts
Contribution to manufacturing 　－ＭＳＥ－

37. optical functional coating
Technical development and
quality control of gradient coatings
Evaluation of
optical functional coating
Contribution to manufacturing 　－ＭＳＥ－

38. Evaluation of coatings
Technical development and quality control
of hard and thin coating on plastics.
Evaluation of coatings
for touch screen
Contribution to manufacturing 　－ＭＳＥ－

39. Evaluation of coating on lens of glasses
Technical development and quality control
of hard and thin coating on plastics.
Evaluation of coating
on lens of glasses
Contribution to manufacturing 　－ＭＳＥ－

40. Visualization will
Visualization will
create innovation.
create innovation.

41. could not measure so far.
parameters which you
You can now measure
could not measure so far.

42. For unmeasurable surfaces
Too hard
surface
For unmeasurable surfaces
Too thin
surface
Too soft
surface

43. Nano-particle erosion opened
this new way for evaluation!

44. The MSE Method

45. Innovation will come!
Save
the energy
Downsizing
Save the
resources

46. The MSE Method

47. Palmeso co., ltd.
株式会社パルメソ

48. ＭＳＥ Tester MSE-A MSE-S 株式会社パルメソ Palmeso co., ltd. Full Automatic Type
High Precision Type
Customization can be done
to meet your application.
MSE-A
Full Automatic Type
Palmeso co., ltd.
株式会社パルメソ