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Published byEstella Fletcher Modified over 8 years ago
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A new piezodriven precision micropositioning stage utilizing flexure hinges 班級:奈米四乙 學號: 4A114087 姓名:李懋靖 任課老師 : 朱志良 Paper 報告:平行桿
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Figure 1. The schematic mechanism of the x–y precision micropositioning stage.
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Figure 2. A schematic drawing of a flexure hinge.
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Figure 3. A schematic demonstration of the output gain of the stage.
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Figure 4. The output characteristic with consideration of compression and extension deformations of the flexure hinges.
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Figure 6. A schematic drawing for the experimental setup.
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Figure 7. The displacement versus the applied voltage for the stage in dual directions: (a) x direction, (b) y direction.
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Figure 8. Time history of the stage for micropositioning test: (a) x direction, (b) y direction.
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Figure 9. Frequency response of the stage: (a) x direction, (b) y direction.
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Thanks for your attention !!
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