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A new piezodriven precision micropositioning stage utilizing flexure hinges 班級:奈米四乙 學號: 4A114087 姓名:李懋靖 任課老師 : 朱志良 Paper 報告:平行桿.

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Presentation on theme: "A new piezodriven precision micropositioning stage utilizing flexure hinges 班級:奈米四乙 學號: 4A114087 姓名:李懋靖 任課老師 : 朱志良 Paper 報告:平行桿."— Presentation transcript:

1 A new piezodriven precision micropositioning stage utilizing flexure hinges 班級:奈米四乙 學號: 4A114087 姓名:李懋靖 任課老師 : 朱志良 Paper 報告:平行桿

2 Figure 1. The schematic mechanism of the x–y precision micropositioning stage.

3 Figure 2. A schematic drawing of a flexure hinge.

4 Figure 3. A schematic demonstration of the output gain of the stage.

5 Figure 4. The output characteristic with consideration of compression and extension deformations of the flexure hinges.

6

7 Figure 6. A schematic drawing for the experimental setup.

8 Figure 7. The displacement versus the applied voltage for the stage in dual directions: (a) x direction, (b) y direction.

9 Figure 8. Time history of the stage for micropositioning test: (a) x direction, (b) y direction.

10 Figure 9. Frequency response of the stage: (a) x direction, (b) y direction.

11 Thanks for your attention !!


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