1. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. (a) A close-up SEM of a rotary comb actuated device. The innermost and outermost radius of combs are 251 and 773μm, respectively. The radial separation gap between the comb fingers is 5μm wide. (b) Etch protection beams attached to springs. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

2. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Model simplification from fixed connection A to pin connection B. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

3. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of a device under test rotated by an amount ϕ. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

4. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of rotary comb drives under equilibrium of forces. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

5. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of rotary comb drives under equilibrium of moments. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

6. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Normalized force versus normalized position of a unit comb with different radius R, finger width of 3μm, and radial separation gap of 3μm. Position 0 indicates the position where the movable comb fingers start to engage the fixed comb fingers. The simulation result implies that the force output by the rotary comb is independent of the comb curvatures ranging from 100 to 500μm in radius. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

7. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. (a) Schematic of the springs with or without protection beams. (b) Simulated rotation angle versus square voltage for spring with or without protection beams. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

8. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Rotation angle versus square voltage for (a) different ring radius, (b) different gap, and (c) different spring length. In the legend, model and sim denote model prediction and simulation result, respectively. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

9. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Spring constant ks versus angle for (a) different ring radius and (b) different spring length. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

10. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Levitation force and out-of-plane levitation versus normalized position. Position 0 indicates the position where the movable comb fingers start to engage the fixed comb fingers. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

11. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Comparison of model solutions of rotary comb drives. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

12. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Ratio of measured angles to model prediction versus parameter H, where model prediction (solid line) was used as a reference. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

13. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of fabrication process flow. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532

14. Date of download: 11/12/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of rotation followed by translation of displacement. Figure Legend: From: Design of an electrostatic rotary comb actuator J. Micro/Nanolith. MEMS MOEMS. 2006;5(2):023008-023008-13. doi:10.1117/1.2198532