1. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 1 MEMS Technology Development for Unmet Medical Needs by Tim Stucchi Sensera Operations Manager

2. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 2 MEMS?  Micro-Electro-Mechanical-Systems  A technique of fabricating Electrical and Mechanical elements on a chip with miniature dimensions  Miniature means dimensions less than the width of a human hair (<100 microns; 1 um =.00004 inches). MEMS vs. Dust Mite vs. Ant’s Leg

3. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 3 MEMS & Nano Scale A 6’ man is 1.83 meters or 1.83M um

4. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com How are MEMS Made? 4

5. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com MEMS Micromachining Electrostatic comb actuator/Surface Acoustic Wave Transducer Semi Isolated Features Elements of Microfluidic pump 5

6. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com Examples of MEMS Devices Resonator Accelerometer Probe Robotic HandsMicro mirrors Biopsy forceps 6

7. MEMS Devices are Everywhere 7 Mobile Electronics Communications Automotive Biomedical

8. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 8 MEMS Devices are Everywhere Mobile Electronics Communications Automotive Biomedical

9. MEMS Market Segments 9

10. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 10 MEMS Market Segments

11. The Opportunity ♥ We see a match between our capabilities and the emerging applications in Diagnostics, Medical Devices and Pharma Biotech. ♥ Healthcare represents about 17% of the US economy; and 8-11% of other Western nations’ GDP. ♥ Healthcare payors will increasingly reward innovation that reduces costs and increases efficiency; MEMS does both! ♥ Microfluidics and drug delivery devices will play a significant role in healthcare technology advances in the next decade. ♥ We see a match between our capabilities and the emerging applications in Diagnostics, Medical Devices and Pharma Biotech. ♥ Healthcare represents about 17% of the US economy; and 8-11% of other Western nations’ GDP. ♥ Healthcare payors will increasingly reward innovation that reduces costs and increases efficiency; MEMS does both! ♥ Microfluidics and drug delivery devices will play a significant role in healthcare technology advances in the next decade. 11 Microfluidic Toxicity screening Proteomic Analysis Gene Sequencing Capillary Electrophoresis Microfluidic Clinical diagnostics Point-of-care diagnostics Veterinary testing Environmental testing Agro-food testing Drug Delivery Devices Microneedles Inhaler nozzle Micropumps DiagnosticsMedicalPharmaceutical Microneedles

12. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 12 The Opportunity ♥ We see a match between our capabilities and the emerging applications in Diagnostics, Medical Devices and Pharma Biotech. ♥ Healthcare represents about 17% of the US economy; and 8-11% of other Western nations’ GDP. ♥ Healthcare payors will increasingly reward innovation that reduces costs and increases efficiency; MEMS does both! ♥ Microfluidics and drug delivery devices will play a significant role in healthcare technology advances in the next decade. ♥ We see a match between our capabilities and the emerging applications in Diagnostics, Medical Devices and Pharma Biotech. ♥ Healthcare represents about 17% of the US economy; and 8-11% of other Western nations’ GDP. ♥ Healthcare payors will increasingly reward innovation that reduces costs and increases efficiency; MEMS does both! ♥ Microfluidics and drug delivery devices will play a significant role in healthcare technology advances in the next decade. Microfluidic Toxicity screening Proteomic Analysis Gene Sequencing Capillary Electrophoresis Microfluidic Clinical diagnostics Point-of-care diagnostics Veterinary testing Environmental testing Agro-food testing Drug Delivery Devices Microneedles Inhaler nozzle Micropumps DiagnosticsMedicalPharmaceutical Microneedles

13. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 13 MEMS Medical Applications

14. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 14 MEMS Medical Applications MEMS enables hundreds of hollow microneedles to be fabricated on a single patch of area, say a square centimeter. This patch is applied to the skin and drug is delivered to the body using micropumps. These micropumps can be electronically controlled to allow specific amounts of the drug and also deliver them at specific intervals. Microneedles are too small to reach and stimulate the nerve endings, and hence cause no pain to the body.

15. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 15 Benefits of MEMS in Diagnostic, Medical & Pharmaceutical Biotech Applications  Smaller volumes of reagent samples required for analysis  Lower power consumption  Less invasive  Integration permits a large number of devices to be built on a single chip  Batch processing lowers cost  Existing processing technologies can be used to make these devices  Miniaturization – portable “System-on-Chip”

16. Corporate Headquarters: 200 Turnpike Road, Chelmsford, MA Microfabrication Facility: 15 Presidential Way, Woburn, MA 01801 www.sensera.com www.sensera.com 16 Challenges and Considerations for MEMS in Diagnostic, Medical & Pharmaceutical Biotech Applications  Regulatory requirements - especially implantable devices which mandate expensive multiyear clinical trials.  Partnerships and collaborators - medical development can be long, expensive and not always straightforward.  Target Segments - the market is highly fragmented.  FUD – nanotech phobias

17. Marriage Counselor for Manufacturers® A Field Sales Company 25 Webb Street Middleton, MA 01949-1724 John M. Knott President Office: 978-777-3993 Mobile: 781-864-2220 johnk@jdtechsales.com www.jdtechsales.com Sales Agent for Sensera 17