1. Physics of Hot, Dense Plasmas
David Attwood University of California, Berkeley

2. Hot-dense plasmas radiate in the EUV/x-ray range
𝜔 𝑝 2 = 𝑒 2 𝑛 𝑒 𝜀 0 𝑚
𝜔 𝑐 = 𝑒𝐵 𝑚
𝑛 𝑐 = 𝜀 0 𝑚 𝜔 2 𝑒 2               8.112a

3. Processes in a plasma
Particle-particle interactions (short-range “collisions”)
Kinetic theory (velocity distribution function)
Collective motion (electron and ion waves)
Wave-particle interactions (collisionless damping and growth)
Wave-wave interactions (linear and non-linear)
Continuum emission
Atomic physics of ionized species (multiple charge states)
Density and temperature
Spatial profiles
Time dependence

4. Understanding hot-dense plasmas requires theory, computations and experiments

5. Plasma theories address physical phenomena at various levels of “particle detail”

6. Plasma theory

7. The velocity distribution function, f(v)

8. Waves in a plasma

9. Wave-particle interactions

10. Linear and non-linear processes: scattering as an example

11. Plasma modeling

12. X-ray and EUV emission from a hot-dense plasma

13. Line and continuum radiation from a hot-dense plasma

14. Blackbody radiation: the equilibrium limit

15. Line and continuum radiation

16. Emission spectra from a xenon plasma

17. Ionization “bottlenecks” limit the number of ionization states present in a plasma
Courtesy of J. Scofield, LLNL

18. Plasma theories address physical phenomena at various levels of “particle detail”

19. Microscopic description of a plasma

20. Theoretical description of a plasma

21. Microscopic description of a plasma (continued)

22. The kinetic description of a plasma

23. The collisionless Maxwell-Vlasov equations

24. A kinetic effect: Landau damping or Landau growth

25. Fluid description of a plasma – two approaches

26. Theoretical description of a plasma (continued)

27. The continuity equation for conservation of mass or particles

28. Conservation of momentum: A force equation for a fluid plasma

29. Conservation of momentum: A force equation for a fluid plasma (continued)

30. The conservation of energy for a plasma fluid

31. The conservation of energy for a plasma fluid (continued)

32. Summary of fluid equations for an isotropic, collisionless plasma

33. Electron-acoustic wave in a plasma

34. Electron-acoustic wave in a plasma (continued)

35. Electron-acoustic wave: dispersion relation

36. Electron-acoustic wave: dispersion diagram

37. Transverse electromagnetic waves in a plasma

38. Transverse electromagnetic waves in a plasma (continued)

39. Transverse electromagnetic waves in a plasma (continued)

40. Propagation in an overdense plasma

41. Propagation in an overdense plasma (continued)

42. Refractive index of a plasma

43. Phase velocity and group velocity

44. Phase velocity and group velocity (continued)

45. Collisional absorption of a transverse wave in a plasma

46. Waves in a magnetized plasma

47. Non-linear processes in a plasma

48. Linear and non-linear processes: scattering as an example

49. Stimulated Brillouin and Raman scattering of intense laser light

50. Stimulated Raman backscattering at Ne ≅ nc/4

51. Very hard x-rays can be generated by intense laser radiation

52. Continuum radiation and blackbody spectra

53. Blackbody radiation

54. Blackbody radiation across a surface

55. Blackbody radiation: the equilibrium limit

56. Three channel soft x-ray streak camera

60. Conventional streak camera
R. Kienberger and F. Krausz,
Attosecond Metrology Comes of Age,
Physica Scripta, T110, 32 (2004)

61. IR laser field/ photoelectron streak camera
Attosecond Streak Recorder (ATR):
R. Kienberger and F. Krausz,
Attosecond Metrology Comes of Age,
Physica Scripta, T110, 32 (2004)

62. Multiple ionization states result in many emission lines

63. Soft x-ray emission spectra from a laser produced plasma

64. Courtesy of R. Kauffman, LLNL
He-like and H-like emission lines from a laser irradiated glass (Si 𝐎 𝟐 ) disk
3 x W/ cm 2
2 nsec
Type equation here.
Courtesy of R. Kauffman, LLNL

65. Laser irradiated titanium disk
2 joules of
helium-like
emission at
4.7 keV, from a 3 KJ, 600 psec irradiation
Courtesy of D. Matthews, LLNL

66. Ionization “bottlenecks” can limit the number of ionization states present in a plasma

67. R. Kelley: atomic and ionic spectral lines

69. Stimulated Raman backscattering at Ne ≅ nc/4

70. Electron energy distribution showing a heated electron tail
Nd,1.06 μm
v os /v th = 0.53
L = 127λ
Courtesy of K. Estabrook, W. Kruer and B. Lasinski, LLNL

71. Suprathermal x-rays at three laser wavelengths
Lawrence Livermore National Laboratory

72. Exteme Ultraviolet (EUV) Lithography
Step and scan system, Mo/Si coated optics at
13.5 nm wavelength,
CO2 laser irradiated
30 μm Sn microspheres
Anticipated market entry for high volume manufacturing at the “7 nm node”, likely in 2018.
Courtesy of V. Banine (ASML) and
W. Kaiser (Zeiss)

73. Searching for a plasma source for EUV lithography: The comparative spectra of Xe and Sn

74. Comparison of Nd and 𝐂𝐎 𝟐 laser produced plasmas
Courtesy of M. Richardson, U. Central Florida

75. Liquid Sn droplets for EUV lithography
28 μm diameter Sn droplets
10 psec Nd prepulse
10 nsec CO 2 heating pulse
Courtesy of M. Nakano, Gigaphoton