1. End-to-End Mass Production Solutions for Gen 1 & 2 Silicon Thin Film Modules Detlev Koch-Ospelt, Head Oerlikon Solar
June 13, 2007

2. Agenda Oerlikon Solar Thin Film Technology Integrated Path to Turnkey
FAB Tailored Configurations
Conclusion
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

3. Lower Cost, High Performance and Good Looking
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

4. Thin Film and Cell Technologies
Module Cross Section
Cell n
Cell n+1
Cell n+2
TCO
TF-Si
Glass
Pattern 3
Pattern 2
Pattern 1
Back Contact
Cell Structure
Glass
TCO
TF-Si
B C
Lamination
Thin
Films
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

5. Technology Roadmap – from Amorph to Micromorph
a-Si/µc-Si
Micromorph
Tandem Cell
0.3 µm
a-Si
Amorph
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

6. The Visible Difference between Amorph and Micromorph
Generation 1
Amorph
Generation 2
Micromorph
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

7. Oerlikon Solar Production Technology
Clean
TCO
Laser
PECVD
Back
Contact
Assembly
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

8. Electrical Contact Layers: TCO 1200
TCO back contact
TCO: Transparent Conductive Oxides
Clean
Laser
PECVD
Assembly
TCO
TCO
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

9. KAI 1200 – Proven Technology for a-Si and mc-Si
Plasma Box® for single reactor processing
40 MHz for increased deposition rates
Parallel processing (20 reactors) and load lock for high throughput
a-Si
a-Si/µC-Si
Clean
TCO
Laser
Assembly
PECVD
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

10. Laser Scribing: LSS 1200 for Module Patterning
Only system qualified for
mass production
all 3 laser scribing patterns
Back Contact (TCO)
a-Si:H
Glass
TCO
Pattern 1
Pattern 2
Pattern 3
Clean
TCO
PECVD
Assembly
Laser
Laser
Laser
Pattern 1
Pattern 2
Pattern 3
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

11. Agenda Oerlikon Solar Thin Film Technology Integrated Path to Turnkey
FAB Tailored Configurations
Continuous Improvement Program
Conclusion
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

12. Integrated Path to Turnkey
KAI 1200
TCO 1200
LSS 1200
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

13. Integrated Path to Turnkey
Glass
Preparation
and
Cleaning
Line Automation
Manufacturing Execution System
KAI 1200
TCO 1200
LSS 1200
Contacted
Tested
Device
Encapsulation
Lamination
Assembly
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

14. Integrated Path to Turnkey
Glass
Preparation
and
Cleaning
Line Automation
Manufacturing Execution System
FAB 1200
Contacted
Tested
Device
Encapsulation
Lamination
Assembly
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

15. Agenda Oerlikon Solar Thin Film Technology Integrated Path to Turnkey
FAB Tailored Configurations
Conclusion
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

16. Tailored Configuration: Fab 1200 Standard
Clean
TCO FC
Laser
PECVD BC
Voc
Contact
White
Reflector
Flasher
Cross
Lamination
Front-End
Back-End
Contacted Tested Device
Encapsulation-Lamination
Line Automation
Tailored Configuration: Turnkey Plus
Clean
TCO FC
Laser
PECVD BC
Voc
Contact
White
Reflector
Flasher
Cross
Lamination
Front-End
Back-End
Contacted Tested Device
Encapsulation-Lamination
Line Automation
Tailored Configuration: Fab 1200 Standard Plus
Clean
TCO FC
Laser
PECVD BC
Voc
Contact
White
Reflector
Flasher
Cross
Lamination
Front-End
Back-End
Contacted Tested Device
Encapsulation-Lamination
Line Automation
Tailored Configuration: Fab 1200 Turnkey
Tailored Configuration: Fab 1200 Standard
Clean
TCO FC
Laser
PECVD BC
Voc
Contact
White
Reflector
Flasher
Cross
Lamination
Front-End
Back-End
Contacted Tested Device
Encapsulation-Lamination
Line Automation
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

17. Smallest Line: 20/30 MWp Configuration
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

18. Agenda Oerlikon Solar Thin Film Technology Integrated Path to Turnkey
FAB Tailored Configurations
Conclusion
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

19. Customers like ersol Thin Film
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

20. and a Strong and Highly Motivated Team
Page June 13, 2007
End-to_End Solutions - D. Koch-Ospelt

21. Thank You for Your Attention