1. Brooks Expert Support Tool (BEST) Software
for VDM300

2. Agenda VDM300 Installation Review Brooks Expert Support Tool (BEST)
Orientation
Mechanical Connections
Electrical Connections
Switches & LED Indicators
Brooks Expert Support Tool (BEST)
USB Cable & Driver
Connecting to VDM
VDM Monitor Screen
Datalogging
Streaming

3. VDM300 Mechanical Overview and Installation

4. VDM300 Top & Bottom View

5. VDM300 Mechanical Overview
4/19/2018
Vapor
Outlet
Vapor
MFC
Water Level Reed Switch
Vapor
Tank
Internal View without cover, PCBA and insulation
DI Water Drain & Fill Valves
Ensure DI water line is connected and a supply of water is being provided during normal operation
Inlet Manifold
DI Water/N2 Inlet
Minimum/Maximum Pressure 10/40 psig
DIW Drain
Front Elevation
Side Elevation

6. Zero Button, LED Indicators & ECAT Address Switches

7. Front Panel Indicator & Switches
4/19/2018
See Section 1-9 of the Installation Manual:
Page 1-6 in IOM

8. Electrical Connections & Communications Ports
Diag Port
Micro USB
Analog
15-pin Dsub
Digital ECAT
RJ-45 Ports
Required connector -
±15 Vdc power to PCBA
& MFC heater
Electrical power for tank heater only. Must be attached and switched on

9. Pin Configuration for 15 pin sub D-connector
4/19/2018
See section 2-6 of the IOM for complete details

10. Installation Highlights
Mount and secure the VDM300 using 4 mounting screws
Vertical, Flow up
Connect vapor outlet to process chamber ensuring the vapor line is heated.
Temperature of the line heater should be greater than the MFC block heater, > 100 °C
Ensure there are no cold spots
It is recommended that an shutoff valve be installed downstream of the VDM

11. Installation

12. Installation Highlights
Connect DI water line
Ensure water pressure is between psig
A constant supply of water during normal operation
Connect 15 pin sub d-connection
±15 Vdc to power the printed circuit board and MFC heater
Input/Output signals
Control signals
Alarms
Connect 230 Vac to the power entry module
Power for the tank heater

13. Startup Sequence
Ensure vapor outlet is connect and pumped down < 200 mTorr
Grounding pin 3 on the 15 pin sub d-connector put the VDM into the startup sequence - See Section 3 of IOM
Evaluates the tank
Starts filling the tank
Turns on MFC heater
Turns on tank heater once tank is filled

14. Brooks Expert Support Tool (BEST)
Setting & monitoring alarms
Changing mode of operation
Data logging
Streaming
Changing specific attributes
Tuning valve response
Standard USB connection to device – no special cables or adaptors required

15. What You Will Need BEST Installation file
Type-A Male to Micro B Male USB Cable
USB Driver
Available at BrooksInstrument.com
32 or 64 bit versions

16. [See video: BEST-Software-VDM300-Sept2017.mp4]
BEST Demo
[See video: BEST-Software-VDM300-Sept2017.mp4]

17. Installation Summary POWER- Ensure they have ±15Vdc and 230 volts AC
Pin 3, See section 3 of the IOM for complete details
Understand the warm-up conditions.
Need water 1st
Ensure DI Water Inlet Min-Max pressure
Pump out downstream of VDM
If tank is not to proper level, tank heater will not turn on
Ensure downstream gas lines are heated above Block temperature.

18. BEST Summary
Load BEST after you have loaded Multiflo 5.34 and or other programs.  It will override the Flocom’s of the other programs
Switch to External control before exiting BEST
Dump attributes before making any adjustments or changes,
Ensure you indicate where the DUMP files will save.

19. Questions?