1. RF MEMS  The solution to power hungry smart phones

2. What are MEMS? Micro(small) Electro(electric components/functionality)
Mechanical(mechanical components/functionality)
Systems(integrated, system-like functionality)

3. Where do you find MEMs? Printers Projectors Cell Phones
*High DPI inkjets
Projectors
*Micro-Mirrors from Texas Instruments
Cell Phones
*Knowles Microphones used in most new cell phones
Automobiles

4. LIMITATIONS OF EXISTING :
 Photovoltaic cells and wind power harvesting have several technical barriers.  In solar cells, the inherent physical limits, the black body energy conversion loss, optical loss, and internal resistance prevent their efficiency from reaching >20%

5. Why MEMS…? Low cost, High yield
Small
*Typically um feature size
Red Blood Cells ~ 10um
Human Hair thickness ~ 50um
Low cost, High yield
*Use existing IC fabrication technology
*Made primarily on Silicon Wafers

6. Why MEMS…? Favorable scaling for a lot of applications
*Flow-rate sensors
*Electrostatics
*Magnetism
*Many others
Not all applications
*Solar Power
*Turbulent Boundary Energy Harvesting

7. Where it Began…?
 First recorded use of MEMs in automobiles Federal emission standards required monitoring the air-to-fuel ratio of the engine Density of air value was needed Many different sensor technologies were introduced to solve this problem MAP (manifold absolute pressure) and MAT (manifold air temperature) sensors were developed using MEMS Silicon based MEMS sensors became the device of choice due to low cost and high yield
MAP Sensor

8. Who Developed It…? *Delco Electronics Group(General Motors)
Two groups
*Delco Electronics Group(General Motors)
*Used piezo resistive sensing
Ford
*Used capacitive sensing

9. Typical Applications
* Accelerometers * Microphones * RF-MEMS Switches * Bridge to Nanotechnology * Mobile Communications

10. RF-MEMS Switches
Types :-
* Capacitive shunt switch: 1.OFF state with capacitive coupling
2.Isolation dependent on capacitive ratio between ON and OFF state
3.Longer contact lifetime

11. Direct Contact Series Switch: 1
* Direct Contact Series Switch: ON state with metal-to-metal ohmic contact 2. Insertion loss dependent on the contact resistance 3. Broad frequency coverage

12. Mobile Communications
Fully Integrated Tunable RF
* If you put your finger on an RF MEMS antenna it can automatically re-tune itself so that no calls are dropped.
*Furthermore, RF MEMS can react to atmospheric conditions and re-tune your phone’s radio to improve 3G and LTE data throughout.
* Most importantly, though, RF MEMS paves the way towards devices with just a single antenna and transceiver.

13. Number of radios in smart phones:
*GSM
*3G
*CDMA, W-CDMA
*Bluetooth, Wi-Fi

14. SPECIFICATIONS * New approach to ohmic switching.
* It can be integrated with capacitors using wafer- level thin-film packaging.
* Multiband (800-to-2200-MHz), low-loss (0.3-dB) chips measure just 3.5 x 4.2 x 1.1 mm.

15. STATISTICS….

16. Advantages & Limitations :
Advantages : *cost  about 2 to 2.5 cents/switch throw—in SPST and SPDT configurations *High precision, High reliability, Linearity *Simplicity of principle *Compatible with conventional IC’s *Low weight *60% reduction in board space. Limitations: *Slower switching speed *Potential lifetime limitations *Packaging

17. CONCLUSION
 MEMS technology provides powerful tools to the RF technology. Replace conventional solid state circuit devices on size.
 Overall MEMS field is not much more than 10 years old, and the RF MEMS field has really been shaped within the past 5-6 years.
The future should be bright and unlimited

18. By
Sai Chand Surya

19. Thank U !
Any Queries….