1. First Annual How to Make it Workshop (July 2016)
Sponsored by
CBM2 and CHANL

2. Agenda DAY 1 (Chapman 125 – UNC Campus)
7:30 am – 8:00 am Registration
8:00 am – 12:00 pm Patterning structures across different length scales
General Overview and Introduction (Donley/Soper)
Patterning Microstructures
Non-optical based patterning of structures
Micromilling – Hupert
Laser Ablation – Hupert
Optical Lithography and Etching – Geil
Wet etching
Dry etching
10:00 am -10:15 am Break
Patterning nanostructures – Donley
Ion beam milling
Electron beam lithography
Thin film deposition and Liftoff – Geil
E-beam and atomic layer deposition
Lift-off for patterning thin films
Noon – 1:30 pm LUNCH
1:30 pm – 3:15 pm Replication Techniques – Park
Hot Embossing
Injection Molding
Nanoimprint Lithography (NIL)
PDMS Casting
DAY 2 (Chapman 125 – UNC Campus)
8:00 am – 8:30 am What is Microfluidics and Nanofluidics? - Soper
Advantages of these platforms
Various substrate materials for micro-/nanofluidics
8:30 am – 12:00 pm Device Applications – Witek
Solid-phase extraction
PCR
DNA microarrays
10:00 am – 10:15 am Break
Capillary electrophoresis - Soper
DNA stretching - Soper
DNA sequencing - Soper
12:00 pm – 1:15 pm LUNCH
1:15 pm – 2:15 pm Metrology – Donley
Profilometry, SEM, AFM, Contact angle, XPS
2:15 pm – 3:30 pm Microfluidic Systems for Molecular Analyses – Murphy
1. Monolithic integration, Modular integration
2. Interconnects, Alignment for assembly, Material
3. Examples – PCR/LDR assays for mutation detection

3. First Day Lectures on Prototyping, Lithography and Embossing/Imprinting
Dr. Matt Hupert discusses with the participants information on micromilling and laser ablation as tools for rapidly prototyping microfluidic devices.
Dr. Bob Geil lectures on a variety of techniques, such as photolithography, wet/dry etching and PDMS casting.
Prof. Sunggook Park provides information on replication based techniques for building microfluidic and nanofluidic devices.

4. Process Demonstrations: Lithography, FIB, Laser Ablation and Hot Embossing
Dr. Matt Hupert discusses with the participants information on micromilling and laser ablation as tools for rapidly prototyping microfluidic devices.
Dr. Bob Geil lectures on a variety of techniques, such as photolithography, wet/dry etching and PDMS casting.
Prof. Sunggook Park provides information on replication based techniques for building microfluidic and nanofluidic devices.

5. Second Day Lectures on Metrology and the Potential Uses of Microfluidics
Dr. Maggie Witek discusses the various uses of microfluidic devices for bioanalytical applications, such as PCR, and mutation detection.
Prof. Michael Murphy shares with the participants information related to integrating devices together to build functional systems.
Workshop participants enjoying the hearty lectures on Days 1 and 2 of the Workshop.

6. Agenda DAY 1 and DAY 2 Process Demonstrations (3:45 pm – 5:30 pm)
DAY 3 (235 Chapman Hall – UNC Campus)
8:30 am Work in teams of 2 and carry out the following steps (Team):
1. Build a microfluidic device
Using molding tool and PDMS casting to build a device with/without a herringbone mixer to mix water with a dye solution
2. Perform metrology on device
Optical Microscopy of structures
3. Device assembly
Plasma treatment of PDMS device
Assemble to glass microscope slide
Fluidic mixing of a dye solution and water
Optical microscopy
12:00 pm – 1:00 pm LUNCH
Presentations – Each team will present slides addressing these points
What are the advantages and disadvantages of using PDMS for microfluidics?
Metrology of device.
Why was the PDMS treated with O2 plasma prior to assembly?
Effects of herringbone mixer on mixing time.
Without the herringbone, what induces the mixing?
DAY 1 and DAY 2
Process Demonstrations (3:45 pm – 5:30 pm)
Photolithography (Bob)
Rapid Prototyping (Varshni)
FIB milling (Amar)
Hot Embossing (Swathi)  

7. Day 3: Hands on – Making a Microfluidic Device for Mixing
Dr. Witek (right) discussing concept of mixing fluidic device with workshop participants.
Drs. Donley and Witek (right) talking to participants on how to use the device that was just made.
Participants using their microfluidic device for the mixing of two reagents and watching the evolution of the mixing with a microscope.
Participants are working on casting PDMS against an SU8 relief that was made the previous day in the lithography process demonstration.

8. Day 3: Hands on – Making a Microfluidic Device for Mixing
Participants engaged in deep discussion about microfluidics.
Dr. Bob Geil talking to Prof. David Kaufman about building microfluidic devices.
Workshop participants carefully going over their data on the performance of their microfluidic device.
Dr. Bob Geil discusses the process of casting PDMS against SU-8 reliefs and then assembling the device by plasma treating the PDMS and conformally sealing to a glass slide.

9. TOTAL NUMBER OF PARTICIPANTS - 15

10. Workshop Feedback Summary of participant comments:
Participants wanted more information in advance.
Schedule should be posted and advertised when people register.
Schedule should be ed to participants before they arrive.
Information on food to be served should be ed.
2. Lectures need to be broken into smaller chunks.
3. Some lectures were too long (Park and Murphy), others too detailed.
4. Participants were looking for more variety in the types of applications presented on day 2.
5. Breaks were too long. Shorter breaks could lead to getting out earlier.
6. Some speakers were too quiet (audience members were likely sitting in back where some ventilation makes it hard to hear).
7. A smaller classroom might have been a better venue for such a small audience.
8. Flash drive with content was a good idea.
9. Guests would appreciate wi-fi access.
10. Parking situation was a bit unclear.
11. Fewer people should be allowed in the cleanroom at once to reduce wait times.
Some attendees struggled with the 8:00am start time, and didn’t make it until later. A start time of 8:30 or 9:00am might mean that more attendees get to see everything. A later starting time would also make things easier on the organizers.